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Sapphire Wafer
Wafer Cleaning
Dry Etching
RIE-330iPC
Patterned Sapphire Substrate (PSS)
MO-CVD
p-GaN/Active/n-GaN Layer Deposition
Photolithography
Expose n-GaN Layer by Etching
Electrode Formation
Element Separation by Etching
Plasma CVD
PD-3800L
Passivation Layer Deposition
RIE-100iPC
Contact Hole Etching
Dicing
Dry Cleaning
PXA-100
Wire Bonding
Phosphor Coating Cleaning before Packaging
LED
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