> Applications > Power Devices
MO-CVD
Epitaxial Growth
Plasma CVD
PD-220LC
PD-220NL
Mask Deposition
Photolithography
Dry Etching
RIE-200iPC
RIE-101iPH
RIE-400iPB
SiO2 Etching
Ion implant & Annealing
Mask Removal
SiO2 Mask Deposition
SiO2 Mask Etching
SiC Etching
SiO2 Mask Removal
SiO2 Film Deposition
Electrode Formation
(Source / Gate / Drain)
Power Transistor
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