Application

SAW Device

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Manufacturing Process

Piezo-electric Substrate

SAW Devices

Electrode Deposition

SAW Devices

Photolithography

SAW Devices

Dry Etching

RIE-200iPC

Electrode Formation

SAW Devices

Plasma Cleaning

PC-1100

Photo Resist Removal

SAW Devices

Dry Etching

RIE Systems

Trimming (1)

Substrate Etching

SAW Devices

Plasma CVD

PECVD Systems

Trimming (2)

Thin Film Deposition

SAW Devices

Plasma CVD

PECVD Systems

Insulating Layer Formation

SAW Devices

Dry Etching

RIE-200iPC

Contact Hole Formation

Etch insulating layer and expose electrode

SAW Devices

Dicing

SAW Devices

Plasma Cleaning

PC-1100

Packaging

Chip Cleaning after Dicing for Wire-bonding

SAW Devices

SAW Filter

SAW Devices

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