Press Releases

December 2006
SAMCO and Tsinghau University signed for a joint research agreement. Details...

November 2006

- Advanced Industrial Science and Technology purchased a SAMCO load-lock Reactive Ion Etching System, Model RIE-200L.

- Major LED manufacturing companies in Taiwan purchased two ICP etching systems (Model RIE-200iP) and a PECVD system (Model PD-3800).

June 2006

- SAMCO sold 2 DRIE systems (Model RIE-200iPB) for MEMS applications in Japan

- SAMCO received an order for a SAMCO RIE-202iPC from a University in Japan for etching of Si and SiO₂

July 2006

- SAMCO received orders for 3 cassette-to-cassette ICP Etching systems, Model RIE-200iPC in July.

June 2006

- SAMCO sold 2 DRIE systems (Model RIE-200iPB) for MEMS applications in Japan

- SAMCO received an order for a SAMCO RIE-202iPC from a University in Japan for etching of Si and SiO₂

- SAMCO received order for an ICP Etching System, Model RIE-212iP in Japan for Sapphire etching applications

May 2006

- SAMCO received orders for seven PC-1000 systems in May.

- A leading mining company in Japan placed orders for three systems (PD-220NL, RIE-200iP and UV-300H)

- SAMCO received orders for five ICP etching systems in May.

- On May 1, 2006, SAMCO released the high-rate silicon etching system, Model RIE-800iPB which is targeted specifically for MEMS devices. Details...

- On May 1, 2006, SAMCO released the high-rate silicon etching system, Model RIE-800iPB which is targeted specifically for MEMS devices. Details...

April 2006

- SAMCO competes in the Indian Market

August 2005

University of Delaware purchases two SAMCO ICP Etching systems for their new nano-fabrication facility

"Initially the etching aspect of our fabrication process at the University of Delaware revolved around a conventional RIE system. However, due to the inherent limitations of this machine we looked to upgrade to an ICP...” Read more