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Optoelectronics

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Blue LED

Blue LED

Processed by SAMCO® RIE-200iP



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Optical Device

Optical Device

Processed by SAMCO RIE-200iP
[Photo by RIKEN]


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Blue LED

Blue LED

Processed by SAMCO RIE-330iPC

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VCSEL

VCSEL

Processed by SAMCO RIE-140iP

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Blue LED

Blue LED

Processed by SAMCO RIE-10NR; [Photo by Optoelectronics Laboratory, Mie Univ]

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Laser Diode

Laser Diode

Processed by SAMCO RIE-140iP

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Photonic Crystal

Photonic Crystal

Processed by SAMCO RIE-200iP
[Photo by Noda's Lab, Kyoto Univ]

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Microlens Array

Microlens Array

[Photo by AIST Kansai]
Processed by SAMCO LS-CVD system

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Photonic Crystal

Photonic Crystal

Processed by SAMCO RIE-200iP; [Photo by Baba Lab, Yokohama Nat'l Univ]

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Antireflection Film

Antireflection Film

Processed by SAMCO LS-CVD system
[Photo by AIST Kansai]

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Photonic Crystal

Photonic Crystal

Processed by SAMCO RIE-200iP; [Photo by Baba Lab, Yokohama Nat'l Univ]

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Polarization Splitter

Polarization Splitter

Processed by SAMCO LS-CVD system
[Photo by AIST Kansai]

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Photonic Crystal

Photonic Crystal

Processed by SAMCO RIE-200iP; [Photo by Baba Lab, Yokohama Nat'l Univ]

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Narrow Waveguide

Narrow Waveguide

Processed by SAMCO RIE-101iPH; [Photo by Baba Lab, Yokohama Nat'l Univ]

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Nanophotonics

Nanophotonics

Processed by SAMCO RIE-400iPB

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Optical Waveguide

Optical Waveguide

Processed by SAMCO LS-CVD system

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