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3D-LSI

3D-LSI

Processed by SAMCO RIE-800iPB

Nano-structured Si Device

Nanostructured Silicon Device

Processed by SAMCO RIE-200NL
[Photo by AIST Tsukuba]

3D-LSI

3D-LSI

Processed by SAMCO LS-CVD system

Failure Analysis

Failure Analysis

Processed by SAMCO RIE-200iP

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