MO (Metal Organic) CVD systems are designed for the growth of multilayer single crystal nitride layers for compound semiconductor devices such as LEDs and LDs.
SAMCO developed and released the first MO-CVD system in Japan in 1981 and has a lot of experiences and experticewealth of experience regarding in MO-CVD systems.

MCV-2018

• GaN film deposition
• Process up to eighteen 2" wafers
• Low cost, small footprint
• Excellent uniformity