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VPE-4F (XeF2)

- Xenon Difluoride Etching System

- Etching of silicon sacrificial layers in MEMS

- Table-top etching system

- Low cost of ownership

 

  

 

  

 

 

  

 

  
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ICP Etching / DRIE

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UV-Ozone Cleaners
 

 

 

 

 

 

 

 

 

 
 
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