Plasma Cleaning System, SAMCO Plasma Cleaner, Model SAMCO PC-1100

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Plasma Cleaning System

Model PC-1100

The SAMCO PC-1100 is a parallel-plate plasma cleaning system designed for surface cleaning of products such as plastic microelectronic packages, liquid crystal display (LCD) substrates and hybrid ICs.

The process chamber enables the user to install multiple sample shelves, and the high degree of flexibility in terms of configuration supports the batch processing of a wide degree of products, from small electronic components to large FPD substrates.

The PC-1100 provides 3 different processing modes (RIE mode, Plasma mode and downstreatm mode) which enables the user to select the optimum processing environment for the unique needs of each product type.

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Dimensions:

Main Unit: 868(W) x 939(D) x 602(H) mm
Stand: 860(W) x 850(D) x 703(H) mm

Options:

- Additional gas lines
- Additional processing shelves
- Larger RF generator (1kW)

Applications

Surface cleaning of plastic packages, LCD substrates, multi-chip modules and hybrid ICs
Precision cleaning of optical components
Surface processing of textiles and polymer materials
Ashing of photoresist
Ink removal

Features

System provides three different process modes: RIE, Plasma and downstream modes
Process chamber can be configured with multiple large processing shelves
Fully automated processing (touch panel)
Recipes can be created and stored using the operator interface
The system has a small footprint and can be installed on a tabletop