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PC-300
- Multi-step recipe storage
- 100 recipes, 10 steps/recipe)
- Removal of organics
PXA-100
- Cleaning of lead frames
- User-friendly touch panel
PC-1100
- Multiple process shelves
- Recipe storage
PC-5000
- Cleaning of plastic packages
- Process up to 500x500mm substrates
- Excellent uniformity
RIE Systems
ICP Etching / DRIE
CVD Systems
Plasma Cleaners
UV-Ozone Cleaners
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