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PC-300

- RIE and Plasma modes

- Multi-step recipe storage

- 100 recipes, 10 steps/recipe)

- Cleaning of plastic packages

- Removal of organics

PXA-100

- Up to 50x200mm samples

- Cleaning of lead frames

- High throughput (~12 sec./substrate)

- User-friendly touch panel

 

PC-1100

- Three processing modes (RIE, Plasma & downstream)

- Multiple process shelves

- Recipe storage

- Compact footprint

PC-5000

- Cleaning of glass substrates

- Cleaning of plastic packages

- Process up to 500x500mm substrates

- Excellent uniformity