Reactive Ion Etching System Model RIE-500SQL (load-lock)

SAMCO's RIE-500SQL is a load-lock Reactive Ion Etching system suitable for high volume processing of flat panel displays of all sizes up to 500mm x 500mm.

The system can handle a wide range of FPD sizes, from small FPDs that are batch processed on trays, to the large FPDs (up to 500 x 500mm) that are processed individually.

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Applications

• Etching of large substrates for flat panel displays