Bench top UV-Ozone Cleaning System Model UV-1

SAMCO's UV-1 is a compact, bench top, UV-Ozone Cleaner that will not damage delicate electronic devices. This easy to operate system uses a unique combination of ultraviolet radiation, ozone and heat to gently, yet effectively, remove organic materials from a variety of substrates including silicon, gallium arsenide (GaAs), Sapphire, metals, ceramics, quartz and glass.

The versatile UV-1 is well-suited for a variety of applications such as substrate cleaning, photoresist descumming, improving wettability, and UV curing. By operating at atmospheric pressure, the SAMCO UV-1 eliminates the need for a cumbersome, high maintenance vacuum system.

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Applications

• Removing organic contamination
  
• Pre-clean wafers prior to deposition/coating
• Descumming photoresist and polyimide
• Modifying surfaces for better adhesion
• Improving lube coverage on magnetic disks
• UV curing
• Growth of thin stable oxide films on silicon and gallium arsenide (GaAs)