Production UV Ozone Cleaning System, Model UV-300HC, cassette to cassette uv ozone cleaner

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UV-Ozone Cleaning System

Model UV-300HC

SAMCO's UV-300HC is a completely dry UV Ozone Cleaning process equipped with cassette to cassette mechanism to strip photoresist and to remove all types of organic contaminant using both UV light radiation and high concentration ozone. This system includes two cassettes and can have a max. of 12 trays/cassette.

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Dimensions:

Main Unit: 1100(W) x 1740(D) x 1625(H) mm

Applications

Stripping of photoresist and polyimide
Removing ink from EPROM wafers without erasing programs
Removing organic contamination from substrates prior to thin film deposition
Surface preparation for lube or photoresist
Descumming photoresist and E-beam resist
Cleaning prior to wafer bonding

Features

Utilizes a unique combination of ultraviolet light, high-concentration ozone and controlled heating for efficient cleaning
Cassette-to-cassette operation
Max. two cassettes with 12 trays/cassette
Equipped with single arm type robot
205mm quartz trays with nine 2" recess
System is also equipped with a cooling stage
Two high-concentration ozone generators
Temperature control (Ambient to 300 C)
Operates at atmospheric pressure - no vacuum system required
Touch panel operation