Process Description: Ozone, in the presence of long wavelengths (200-300nm) UV radiation, decomposes into oxygen molecules and atomic oxygen. Simultaneously, organic materials such as photoresist, ink, human skin oil, pump oil, etc. are excited or dissociated by the long wavelength UV radiation. The atomic oxygen is highly reactive and oxidizes the excited organic molecules to form simpler, harmless volatile products, such as carbon dioxide, water, nitrogen, etc. Organic contaminants are cleaned and removed from the substrate surface using SAMCO's UV-Ozone Cleaning systems.