The Bosch Process is a high-aspect ratio etching technology, which repeats the cycle of isotropic etching followed by protection film deposition.
The plasma of SF6 etches, and the plasma of C4F8 creates a protection layer. The Bosch Process enables highly anisotropic etching.
SAMCO is licensed for the Bosch Process, which was developed by Robert Bosch GmbH in 1992. SAMCO is the first company in Japan to be licensed to incorporate the Bosch Process and developed the Bosch Process systems.
This process is widely used in manufacturing car components such as acceleration sensors and gyroscope sensors,medical devices such as μTAS, etc., and MEMS such as 3D devices.