High-performance a-Si_1–xO_x:H/c-Si heterojunction solar cells realized by the a-Si:H/a-Si_1–xO_x:H stack buffer layer

He Zhang¹, Kazuyoshi Nakada², Shinsuke Miyajima² and Makoto Konagai^1,2
Phys. Status Solidi RRL (2015) 9: 225–229.
1 MEXT/FUTURE-PV Innovation Research, Japan Science and Technology (JST), Koriyama, Fukushima, Japan
2 Department of Physical Electronics, Tokyo Institute of Technology, Meguro-ku, Tokyo, Japan

Samco PECVD system was used for silicon thin film deposition in solar cell fabrication.