A VHF temperature compensated lithium niobate-on-oxide resonator with Q > 3900 for low phase noise oscillators

Grace W. Fanga, Gayathri Pillaib, Ming-Huang Lic, Chun-You Liua, Sheng-Shian Lia
a Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
b Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
c MNTL, University of Illinois at Urbana Champaign, Urbana, IL, USA

2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, 2018, pp. 723-726.

LiNbO3-based resonator with high Q over 3900 was fabricated in this research. Samco Reactive Ion Etching Tool was used for LiNbO3 etching with SiO2 in chlorine-based chemistry.

Samco is capable of high-quality plasma etching processes of various materials. Please see our process data page for more details.
Plasma Etching & PECVD Process Data