Category: Other Materials Etch

20 Apr

Scientific Paper on Resin Patterning Using Plasma Etching from Toyama Prefectural University, Japan

Samco 2016 Customer, Other Materials Etch, Resist, Samco Customer Publication

Sub-70 nm resolution patterning of high etch-resistant epoxy novolac resins using gas permeable templates in ultraviolet nanoimprint lithography

Satoshi Takei and Makoto Hanabata
Toyama Prefectural University, Imizu, Toyama 939-0398, Japan
Appl. Phys. Express (2016) 9 056501

Samco tabletop Reactive Ion Etching (RIE) System was used for evaluation of resist materials on plasma etch selectivity. Resin etching process was performed using fluorine chemistry.

02 Mar

Scientific Paper on TiN Nanoparticle Array Fabrication Process by Kyoto University

Samco Other Materials Etch, Si DRIE, Silicon/Dielectrics Etch, TiN Etch

Plasmonic arrays of titanium nitride nanoparticles fabricated from epitaxial thin films

Shunsuke Murai, Koji Fujita, Yohei Daido, Ryuichiro Yasuhara, Ryosuke Kamakura, and Katsuhisa Tanaka
Shunsuke Murai1,2 Koji Fujita1,3> Yohei Daido1 Ryuichiro Yasuhara1 Ryosuke Kamakura1 and Katsuhisa Tanaka1
1 Department of Material Chemistry, Graduate School of Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan.
Optics Express Vol. 24, Issue 2, pp. 1143-1153 (2016) •doi: 10.1364/OE.24.001143

Titanium Nitiride (TiN) nanoparticle arrays were fabricated using nanoimprint technologies.
For nanoimprint mold fabrication, Samco deep silicon etching system at Kyoto University was used for nanostructure fabrication on silicon molds. After transferring of the silicon mold pattern to photoresist on TiN substrate, Samco ICP etching system at Kyoto University was used for TiN dry etching over photoresist to fabricate TiN nanoparticle arrays.

29 Feb

Scientific Paper on ITO-based MEMS Sensor from AIST and the University of Tokyo

Samco 2016 Customer, CYTOP Etch, Other Materials Etch, Samco Customer Publication

ITO-Based MEMS Sensor Electrode for Dynamic Cow-Rumen pH Sensing

Lan Zhang1, Jian Lu1, Hirofumi Nogami1, 2, Hironao Okada2, Toshihiro Itoh1, 3

1 Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST)
2 Department of Mechanical Engineering, Kyushu University
3 Department of Human and Engineered Environmental Studies, the University of Tokyo
IEEJ Transactions on Sensors and Micromachines (2016) 136, No. 11 P 482-487
A PH sensor was fabricated combining a metal-oxide-semiconductor field-effect transistor (MOSFET) with a separate sensing electrode made of indium tin oxide (ITO) film. Samco RIE etch system was used for plasma etching of an amorphous fluoropolymer CYTOP fluoropolymer film in device fabrication.

19 Feb

Scientific Paper on Nano-device to Measure Membrane Transporter Activity From the University of Tokyo

Samco 2016 Customer, Other Materials Etch, Samco Customer Publication

Novel Nano-Device to Measure Voltage-Driven Membrane Transporter Activity

Rikiya Watanabe, Naoki Soga, and Hiroyuki Noji
Dept. of Appl. Chem., Univ. of Tokyo, Tokyo, Japan
IEEE TRANSACTIONS ON NANOTECHNOLOGY (2016) 15, NO. 1

SAMCO open-load Reactive Ion Etching Tool was used for patterning of carbon-fluorine hydrophobic polymer (CYTOP) by dry etching of the layer against photoresist.

12 Nov

Scientific Paper on TiO2 Plasma Etching for Photonic Bandgap Structure from Tokyo Institute of Technology Team

Samco 2015 Customer, Other Materials Etch, Samco Customer Publication, TiO2 Etch

Calculation and fabrication of two-dimensional complete photonic bandgap structures composed of rutile TiO2 single crystals in air/liquid

Sachiko Matsushita1, Akihiro Matsutani2, Yasushi Morii1, Daito Kobayashi1, Kunio Nishioka2, Dai Shoji2, Mina Sato2, Tetsu Tatsuma3, Takumi Sannomiya1, Toshihiro Isobe1, Akira Nakajima1
1 Department of Metallurgy & Ceramics Science, Graduate School of Science & Technology, Tokyo Institute of Technology, 2-12-1-S7-8, Ookayama, Meguro-ku, Tokyo, 152-8552, Japan
2 Technical Department, Semiconductor and MEMS Processing Center, Tokyo Institute of Technology, 4259-R2-3 Nagatsuta, Midori-ku, Yokohama, 226-8503, Japan
3 Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo, 153-8505, Japan
Journal of Materials Science (2016) Volume 51, Issue 2, pp 1066-1073

Titanium Dioxide (TiO2) photonic crystal structure was fabricated using Samco Reactive Ion Etch (RIE) system using fluorine chemistry. Two-dimensional photonic band gaps of the TiO2 structure were theoretically and experimentally studied.

Go to Nakajima & Matushita Lab, Tokyo Institute of Technology

22 Jul

Scientific Paper on Light Emitting Transistor Fabrication by Waseda University Team

Samco 2015 Customer, Other Materials Etch, Photonic Devices, Resist, Samco Customer Publication

Ambipolar light-emitting organic single-crystal transistors with a grating resonator

Kenichi Maruyama1, Kosuke Sawabe2, Tomo Sakanoue1, Jinpeng Li1, Wataru Takahashi1, Shu Hotta3, Yoshihiro Iwasa4 & Taishi Takenobu1
1Department of Applied Physics, Graduate School of Advanced Science and Engineering, Waseda University, Tokyo 169-8555, Japan.
2Department of Physics, Graduate School of Science, Tohoku University, Sendai 980-8578, Japan.
3Faculty of Materials Science and Engineering Kyoto Institute of Technology, Kyoto 606-8585, Japan.
4Quantum-Phase Electronics Center and Department of Applied Physics, The University of Tokyo, Tokyo 113-8656, Japan, RIKEN Center for Emergent Matter Science (CEMS), Wako 351-0198, Japan.
Scientific Reports 5, Article number: 10221 (2015)
doi:10.1038/srep10221

Samco ICP etcher was used for dry etching of UV-curable resist and α,ω-bis(biphenylyl)terthiophene (BP3T) single-crystal in UV-nanoimprint lithography process for electrically driven organic laser fabrication.

10 Jul

Scientific Paper on Fabrication of Amorphous Oxide Thin Film Transistors (TFTs) by AIST, Japan

Samco 2015 Customer, ITO Etch, Other Materials Etch, RuO2, Samco Customer Publication, Silicon/Dielectrics Etch, SiO2 Etch, TFT

Electrophoretic displays driven by all-oxide thin-film transistor backplanes fabricated using a solution process

Satoshi Inoue, Tue Trong Phan, Tomoko Hori, Hiroaki Koyama and Tatsuya Shimoda
Green Device Research Center, Japan Advanced Institute of Science and Technology, Ishikawa 923-1211, Japan
physica status solidi (a) Volume 212, Issue 10, pages 2133–2140, October 2015

Samco ICP etching system was used for plasma etching of the Ruthenium Oxide (RuO2), Zr-In-Zn-O (ZIZO), Silicon Dioxide (SiO2) and Indium Tin Oxide (ITO) films.

Our process capabilites of SiO2 dry etching can be found in the page below.
SiO2 Dry Etching Process (RIE or ICP-RIE)

01 Mar

Scientific Paper on Sapphire Etching from Princeton University Using SAMCO ICP Etch System

Samco 2015 Customer, LEDs, Other Materials Etch, Samco Customer Publication, Sapphire Etch

Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials

Hao Chen, Qi Zhang and Stephen Y Chou
Nanostructure Laboratory, Department of Electrical Engineering, Princeton University, Princeton, NJ
08544, USA
Nanotechnology (2015) 26 085302 (8pp)

Samco ICP etching system, RIE-200iP was used for recipe optimization of sapphire nanopatterning to improve light extraction of LEDs.

Go to Chou Research Group Website

Sapphire Periodic Table

For our process capabilities on Sapphire plasma etching, please visit the process data page below.
Sapphire Dry Etching Process (ICP-RIE)

10 Jan

Scientific Paper on Sapphire Plasma Etching from National Tsing-Hua University, Taiwan

Samco 2015 Customer, Other Materials Etch, Samco Customer Publication, Sapphire Etch

Bulk vertical micromachining of single-crystal sapphire using inductively coupled plasma etching for x-ray resonant cavities

P-C Chen1, P-T Lin1, D G Mikolas1, Y-W Tsai2, Y-L Wang1, C-C Fu1 and S-L Chang2
1 Institute of Nano Engineering and Microsystems, National Tsing-Hua University, No. 101, Kuang-fu Rd, Sec. II, Hsinchu 300, Taiwan
2 Department of Physics, National Tsing-Hua University, No. 101, Kuang-fu Rd, Sec. II, Hsinchu 300, Taiwan
J. Micromech. Microeng. (2015) 25 015016

Samco ICP Etching System was used for the recipe optimization of sapphire plasma etching in x-ray resonant cavity fabrication.

Sapphire Periodic Table

For our process capabilities of sapphire plasma etching, please visit the page below.
Sapphire Dry Etching Process (ICP-RIE)

12 Jul

Scientific Paper on Nb-TiO2 Dry Etching Process from Tokyo Institute of Technology

Samco 2014 Customer, Other Materials Etch, Samco Customer Publication, TiO2 Etch

Angled etching of (001) rutile Nb–TiO2 substrate using SF6-based capacitively coupled plasma reactive ion etching

Akihiro Matsutani1, Kunio Nishioka1, Mina Sato1, Dai Shoji1, Daito Kobayashi2, Toshihiro Isobe2, Akira Nakajima2, Tetsu Tatsuma3 and Sachiko Matsushita2
1 Semiconductor and MEMS Processing Center, Tokyo Institute of Technology, Yokohama 226-8503, Japan
2 Department of Metallurgy and Ceramics Science, Tokyo Institute of Technology, Meguro, Tokyo 152-8550, Japan
3 Institute of Industrial Science, The University of Tokyo, Meguro, Tokyo 153-8505, Japan
Jpn. J. Appl. Phys. (2014) 53 06JF02

Rutile Nb–TiO2 substrates were etched using Samco Reactive Ion Etch (RIE) System. Vertical sidewalls and a smooth surface were successfully achieved.

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