Category: Surface Treatment

05 Jul

Scientific paper on surface wettability patterning by UT Dallas

SAMCO 2017 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Difference in growth and coalescing patterns of droplets on bi-philic surfaces with varying spatial distribution

Martand Mayukh Garimella, Sudheer Koppu, Shantanu Shrikant Kadlaskar, Venkata Pillutla, Abhijeet, Wonjae Choi
Department of Mechanical Engineering, University of Texas at Dallas, 800 W. Campbell Road, Richardson, TX 75080

Journal of Colloid and Interface Science (2017)

In this paper, surface wettability patterning was performed, and unique water droplet motion on the patterned regions was investigated. Samco UV-ozone cleaner, UV-1 at UT Dallas was used for complete native oxide removal after hydrofluoric acid treatment.

Surface wettability modulation (hydrophilic and hydrophobic) is fundamental for material research and device fabrication. Samco is developing surface treatment processes using UV-ozone technologies and plasma technologies. If you are interested in our latest material processing technologies and publication, please visit the page below.
Material Processing Data

Tabletop UV-Ozone Cleaner

02 Jan

Scientific Paper on Plasma Surface Oxidation of In2O3 by Paul-Drude-Institut

SAMCO 2016 Customer, In2O3, Plasma Treatment, SAMCO Customer Publication, Surface Treatment

Consequences of plasma oxidation and vacuum annealing on the chemical properties and electron accumulation of In2O3 surfaces

Theresa Berthold1, Julius Rombach2 Thomas Stauden1 Vladimir Polyakov3
Volker Cimalla3 Stefan Krischok1 Oliver Bierwagen2 and Marcel Himmerlich1
1 Institut fur Mikro- und Nanotechnologien MacroNano, Technische Universit€at Ilmenau, PF 100565, 98684 Ilmenau, Germany
2 Paul-Drude-Institut fur Festk€orperelektronik, Hausvogteiplatz 5–7, 10117 Berlin, Germany
3 Fraunhofer-Institut fur Angewandte Festk€orperphysik, Tullastraße 72, 79108 Freiburg, Germany
Journal of Applied Physics 120, 245301 (2016)

Indium Oxide (In2O3) is used for metal contacts of electronic devices. It is known that defects (oxygen vacancies) and impurities (adsorbates) of In2O3 films change electron concentration. In previous papers, surface treatment techniques using plasma technologies were investigated to reduce the defects and impurities of In2Ofilms.

In this paper, Samco ICP plasma etching tool at Paul-Drude-Institut was used for plasma surface oxidation of In2O3, and the samples were treated by subsequent vacuum annealing. It was found that oxygen plasma treatment reduced adsorbed carbon impurities and removed surface defect states, attributed to oxygen vacancies.

16 Nov

Scientific Paper on β-Ga2O3 MOSFET Fabrication from U.S. Naval Research Laboratory

SAMCO 2016 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Communication—A (001) β-Ga2O3 MOSFET with +2.9 V Threshold Voltage and HfO2 Gate Dielectric

Marko J. Tadjerz, Nadeemullah A. Mahadik, Virginia D. Wheeler, Evan R. Glaser, Laura Ruppalt, Andrew D. Koehler, Karl D. Hobart, Charles R. Eddy Jr. and Fritz J. Kub
United States Naval Research Laboratory, Washington, DC 20375, USA
ECS J. Solid State Sci. Technol. 2016 volume 5, issue 9, P468-P470

Gallium Oxide (Ga2O3) is a wide bandgap material with high breakdown voltage, and it is a promising material for power device applications. Compared to other wide bandgap materials such as Silicon Carbide (SiC) and Gallium Nitride (GaN), the device research using this material is still primitive. However, β-Ga2O3 substrates are commercially available, and more and more researchers are getting interested in its unique material properties.

Here, β-Ga2O3 MOSFET was fabricated using commercially available β-Ga2O3 substrates. Samco UV-Ozone Cleaner at United States Naval Research Laboratory was used for surface cleaning of SiO2/Si substrate in sample preparation.

28 Oct

Scientific Paper on Organic Rectifying Diode Fabrication Using Gold Plasma Treatment by University of Tokyo

SAMCO 2016 Customer, Gold, Plasma Treatment, SAMCO Customer Publication, Surface Treatment

A Mechanically Durable and Flexible Organic Rectifying Diode with a Polyethylenimine Ethoxylated Cathode

Naoji Matsuhisa, Hiroaki Sakamoto, Tomoyuki Yokota, Peter Zalar, Amir Reuveny, Sunghoon Lee and Takao Someya
Electrical and Electronic Engineering and Information Systems, University of Tokyo
7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
Advanced Electronic Materials Volume 2, Issue 10, October 2016

Flexible organic diode device fabrication is performed using Samco process equipment. Samco plasma cleaner PC-300 was used for wettability improvement of polyethylenimine ethoxylated (PEIE) surfaces and for work function improvement of gold (Au) electrode.

Someya lab, University of Tokyo is one of Samco plasma cleaner customers. Our plasma cleaner is used for organic transistor fabrication, and they have published several papers on cutting-edge flexible MEMS devices.

Go to Someya lab website.

Samco plasma cleaners are versatile tools for plasma treatment and cleaning of various materials. For metal surface cleaning, gold plasma treatment is one of the common surface cleaning technique before device packaging. Not only gold but also various metal materials can be processed including aluminum, silver & titanium. We have a special process technique to reduce corrosion risk of metal surfaces caused by plasma cleaning process. Furthermore, multiple shelves inside process chamber enable batch processing of several samples in one time. For more spec details of the plasma cleaners, please visit the product page below.

Plasma Cleaner

06 Sep

Scientific Paper on Wettability Control in Porous Media Using UV-Ozone Treatment by MIT

SAMCO 2016 Customer, Microfluidics, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Wettability control on multiphase flow in patterned microfluidics

Benzhong Zhaoa, Christopher W. MacMinnb, and Ruben Juanesa
a Department of Civil and Environmental Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139;
b Department of Engineering Science, University of Oxford, Oxford OX1 3PJ, United Kingdom
PNAS (2016) DOI10.1073/pnas.1603387113

Fluid–fluid displacement in porous media of microfluidic flow cell was studied for potential CO2 sequestration application to solve global warming caused by the greenhouse gas.
Samco tabletop UV-ozone cleaner at MIT was used for wettability improvement of photocurable polymer NOA81 to fabricate microfluidic flow cells.

This article was featured in MIT News.
View the news article.

15 Aug

Scientific Paper on Nanopore DNA Sequencing Technique Development

SAMCO 2016 Customer, Microfluidics, Plasma Treatment, SAMCO Customer Publication, Surface Treatment

Integrated solid-state nanopore platform for nanopore fabrication via dielectric breakdown, DNAspeed deceleration and noise reduction

Yusuke Goto, Itaru Yanagi, Kazuma Matsui, Takahide Yokoi & Ken-ichi Takeda
Center for Technology Innovation – Healthcare, Research & Development Group, Hitachi Ltd.,1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan.
Scientific Reports 6, Article number: 31324 (2016) doi:10.1038/srep31324

Samco plasma cleaner was used for surface cleaning and wettability modulation of substrates with Si3N4 membranes in sample preparation.

15 May

Scientific Paper on ZnO UV-Ozone Treatment for ZnO-FET Fabrication from Chiba University

SAMCO 2016 Customer, OFET, SAMCO Customer Publication, Surface Treatment, UV-Ozone, ZnO

Physical Property Evaluation of ZnO Thin Film Fabricated by Low-Temperature Process for Flexible Transparent TFT

Khafe, Adie Bin Mohd1; Watanabe, Hiraku1; Yamauchi, Hiroshi1; Kuniyoshi, Shigekazu1; Iizuka, Masaaki2; Sakai, Masatoshi1; Kudo, Kazuhiro1
1 Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
2 Faculty of Education, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
Journal of Nanoscience and Nanotechnology, Volume 16, Number 4, April 2016, pp. 3168-3175(8)

Samco UV-Ozone cleaner, UV-1 was used for ultraviolet/ozone (UV-O3) assisted thermal treatments on wet processed zinc oxide field effect transistor (ZnO-FET) to improve drain current and mobility of the ZnO-based device. They found that UV-Ozone treatment eliminated carbon impurities in ZnO thin film and improved the performance of ZnO-FET.

10 May

Scientific Paper on Surface Fluorination of Rutile-TiO2 Film by Ritsumeikan University

SAMCO 2016 Customer, Plasma Treatment, SAMCO Customer Publication, Surface Treatment, TiO2

Surface fluorination of rutile-TiO2 thin films deposited by reactive sputtering for accelerating response of optically driven capillary effect

Taizo Kobayashi1, Hironobu Maeda2, and Satoshi Konishi3
1 Ritsumeikan-Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
2 Graduate School of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
3 Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Japanese Journal of Applied Physics 55, 06GP03 (2016)

TiO2 thin films with the rutile phase were fluorinated using Samco RIE system to enhance the photoresponsivity.

13 Apr

Scientific Paper on Tetracene Growth Process from Cornell University

SAMCO 2016 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Unexpected Effects of the Rate of Deposition on the Mode of Growth and Morphology of Thin Films of Tetracene Grown on SiO2

R. K. Nahm and J. R. Engstrom
School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
J. Phys. Chem. C, 2016, 120 (13), pp 7183–7191
DOI: 10.1021/acs.jpcc.6b00963

Samco UV-Ozone cleaner at Cornell University was used for sample preparation before tetracene growth.

31 Mar

Scientific paper on Organic FET Fabrication by Yamagata University

SAMCO 2015 Customer, Plasma Treatment, SAMCO Customer Publication, Surface Treatment

An Extended-gate Type Organic FET Based Biosensor for Detecting Biogenic Amines in Aqueous Solution

Tsuyoshi MINAMI, Tsubasa SATO, Tsukuru MINAMIKI, and Shizuo TOKITO
Research Center for Organic Electronics (ROEL), Graduate School of Science and Engineering, Yamagata
University, 4-3-16 Jonan, Yonezawa, Yamagata 992–8510, Japan
Analytical Sciences (2015) 31

An organic field-effect transistor (OFET) was fabricated for detection of biogenic amines in an aqueous solution. In device fabrication, Samco Plasma Cleaner PC-300 was used for oxygen plasma treatment of metal electrodes for surface cleaning.

For more details of our plasma cleaners, please visit the product page below.
Plasma Cleaners

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