Category: Surface Treatment

31 May

Scientific paper on energy-conversion device from Politecnico di Torino

Samco 2022 Customer, Plasma Treatment, Samco Customer Publication, Surface Treatment

Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices

Alberghini, M., Morciano, M., Giardino, M., Perrucci, F., Scaltrito, L., Janner, D., Chiavazzo, E., Fasano, M., Asinari, P., Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices. Adv. Mater. Interfaces 2022, 2200057. https://doi.org/10.1002/admi.202200057

Samco RIE system RIE-10NR was used for oxygen plasma treatment for surface functionalization in fabrication of passive energy-conversion devices.

14 Mar

Scientific paper on PDMS microfluidic device fabrication from the University of Tokyo

Samco 2022 Customer, Plasma Treatment, Samco Customer Publication, Surface Treatment

Functional analysis of human brain endothelium using a microfluidic device integrating a cell culture insert

Shigenori Miura1, Yuya Morimoto2, Tomomi Furihata3 and Takeuchi1,2,4
1 Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
2 Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Tokyo, Japan
3 Laboratory of Clinical Pharmacy and Experimental Therapeutics, School of Pharmacy, Tokyo University of Pharmacy and Life Sciences, Tokyo, Japan
4 International Research Center for Neurointelligence (WPI-IRCN), The University of Tokyo Institutes for Advanced Study (UTIAS), The University of Tokyo, Tokyo, Japan
APL Bioengineering 6, 016103 (2022); https://doi.org/10.1063/5.0085564

Aqua Plasma Treatment was used for PDMS/PDMS bonding microfluidic device fabrication. Samco Aqua Plasma technology for polymer surface activation and bonding without adhesives can be found in the following webpage.

Plasma Treatment & Bonding for Polymer Microfluidics

10 Mar

Scientific paper on metal-oxide transistors from Chung-Ang University

Samco 2022 Customer, Samco Customer Publication, Surface Treatment

Symmetrically Ion-Gated In-Plane Metal-Oxide Transistors
for Highly Sensitive and Low-Voltage Driven Bioelectronics

Jingu Kanga), Young-Woo Janga), Sang Hee Moona), Youngjin Kangb), Jaehyun Kimc), Yong-Hoon Kimb), Sung Kyu Parka)
a) School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 06974, Korea
b) School of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 16419, Korea
c) Department of Chemistry and Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208, USA
Adv. Sci. 2022, 2103275. https://doi.org/10.1002/advs.202103275

Samco UV-Ozone cleaner UV-1 was used for surface treatment of aluminum to form a monolithic Al2O3 layer in fabrication of metal-oxide transistors with amorphous indium-gallium-zinc oxide (a-IGZO).

28 Feb

Scientific paper on organic FET fabrication from Carleton University

Samco 2022 Customer, Microfluidics, PMMA, Samco Customer Publication, Surface Treatment, UV-Ozone

A Low Temperature Processed, Soft-fluidic OEGFET Saliva Aptasensor for Cortisol

Roslyn S. Massey and Ravi Prakash
Department of Electronics Engineering, Carleton University, Ottawa, ON K1S 5B6, Canada;
IEEE Journal on Flexible Electronics, 1 – 1, 2022

Samco UV-Ozone cleaner UV-1 was used for PMMA surface treatment in biosensor fabrication.

30 Aug

Scientific paper on cell microarray chip by AIST

Samco 2018 Customer, Samco Customer Publication, Surface Treatment

Pseudo-Infected Red Blood Cell Beads as Positive Control for Cell Microarray Chip–Based Detection of Plasmodium-Infected RBCs

Muneaki Hashimoto 1, Masahiko Numata 2, Shouki Yatsushiro 1, Yusuke Ido 1, Masato Tanaka 1, Kazuaki Kajimoto 1, and Masatoshi Kataoka 1

1 Health Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 2217-14, Hayashi-cho, Takamatsu, Kagawa 761-0301, Japan.

2 National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1, Umezono, Tsukuba, Ibaraki 305-8563, Japan.

A cell microarray chip was fabricated to detect detect red blood cells (RBCs) infected with the causative agent of malaria, Plasmodium. In this research, Samco RIE system was used for hydrophilic surface treatment of the microarray devices.

Samco plasma equipment is widely used not only for conventional semiconductor device research but also for biomedical research field. Plasma treatment technology is useful for wettability improvement of surfaces for cell adhesion and stable liquid flow inside fine micro-channels. Aqua Plasma®, unique plasma treatment technology is beneficial for super-hydrophilic surfaces and direct bonding of polymer substrates such as COP (cyclo-olefin polymer) and COC (cyclo-olefin polymer). Please check process solution page below for more details.

Plasma Treatment & Bonding for Polymer Microfluidics

26 Sep

Scientific paper on fluorescence microscopy in microfluidic chips by the University of Tokyo

Samco PDMS, Plasma Treatment, Surface Treatment

On-chip cell analysis platform: Implementation of contact fluorescence microscopy in microfluidic chips

Hiroaki Takehara1, Osawa Kazutaka2, Makito Haruta2, Toshihiko Noda2, Kiyotaka Sasagawa2, Takashi Tokuda2 and Jun Ohta2
1 Department of Materials Engineering, Graduate School of Engineering, The University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
2 Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
AIP Advances 7, 095213 (2017)

In this research, on-chip cell analysis platform for integrating contact fluorescence microscopy was performed using microfluidic chips. In microfluidic device fabrication, PDMS and ultra-thin glass substrates were bonded using exposure to oxygen plasma. Samco RIE etcher was used for oxygen plasma treatment of the substrates.

Samco offers plasma treatment technologies for microfluidics fabrication. Unique plasma processes enable plasma bonding of substrates such as COP and glass without microchannel pattern collapse because there is no need to implement mechanical pressing and heating for bonding. For more details, please visit the process page below.
Plasma Treatment & Bonding for Polymer Microfluidics

21 Aug

Scientific paper on low-temperature annealing of InGaZnO transistors by Nara Institute of Science and Technology

Samco 2017 Customer, Samco Customer Publication, Surface Treatment, UV-Ozone

Low temperature (150°C) wet oxygen annealing of amorphous InGaZnO thin-film transistors for flexible device applications

M. P. Jallorina, J. P. Bermundo, Y. Ishikawa and Y. Uraoka
Nara Institute of Science and Technology, Graduate School of Materials Science, 8916-5 Takayama, Ikoma, Nara 630-0192 Japan
2017 24th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), Kyoto, Japan, 2017, pp. 203-204.

Low-temperature processing is required in flexible polymer device fabrication because temperature setting is limited by native melting temperature of polymer materials. In this research, several methods of ultraviolet (UV), ozone (O3) and wet oxygen (Wet O2) were compared to investigate the effects on the device performance. Samco UV-ozone cleaner UV-1 was used for UV, ozone or UV-ozone processes. The results show that UV & O3 annealing at 150°C has higher mobility. Samco UV-ozone cleaners are equipped with stage heating (up to 300degC) and ex-situ ozone generator to promote generation of reactive atomic oxygen in thermal ozone dissociation. For more details of our UV-ozone technologies, please visit the product page.
Samco UV-Ozone Cleaner (Tabletop & Production Models)

Tabletop UV-Ozone Cleaner

20 Aug

Scientific paper on printable elastic conductors by the University of Tokyo

Samco 2017 Customer, Samco Customer Publication, Surface Treatment, UV-Ozone

Printable elastic conductors by in situ formation of silver nanoparticles from silver flakes

Naoji Matsuhisa1, Daishi Inoue2, Peter Zalar1,3, Hanbit Jin1, Yorishige Matsuba1,3, Akira Itoh1,3, Tomoyuki Yokota1,3, Daisuke Hashizume2 and Takao Someya1,2,3,4
1Department of Electrical Engineering and Information Systems, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
2Center for Emergent Matter Science (CEMS), RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
3Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency (JST), 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan.
4Thin-Film Device Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
Nature Materials 16, 834–840 (2017)

Someya lab at the University of Tokyo is famous for printable and stretchable electronics for healthcare and wearable device applications. In this research, silver nanoparticles were used as conductive materials in flexible sensor and actuator networks, expecting large-area manufacturing using printing technologies. In the fabrication of stretchable pressure and temperature sensor, Samco UV-ozone cleaner UV-1 was used for UV curing of photoresist PSR-301A. Samco offers multiple systems of surface treatment (plasma cleaning and UV-ozone cleaning) for device fabrication and material research.

uv-1 uv-ozone cleaner

16 Aug

Scientific paper on red blood cell analysis using plasma-treated COC plate by AIST

Samco 2017 Customer, COC, Plasma Treatment, Samco Customer Publication, Surface Treatment

Hydrophilic-treated plastic plates for wide-range analysis of Giemsa-stained red blood cells and automated Plasmodium infection rate counting

Muneaki Hashimoto1, Shouki Yatsushiro1, Shohei Yamamura1, Masato Tanaka1, Hirokazu Sakamoto1,3, Yusuke Ido1, Kazuaki Kajimoto1, Mika Bando2, Jun‑ichi Kido2 and Masatoshi Kataoka1
1Health Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 2217‑14, Hayashi‑cho, Takamatsu, Kagawa 761‑0301, Japan.
2Department of Periodontology and Endodontology, Institute of Health Biosciences, The University of Tokushima Graduate School, Institute of Health Biosciences, 3‑18‑15 Kuramoto, Tokushima 770‑8504, Japan.
Malar J (2017) 16 321
As a new method of malaria diagnostics, the count of Plasmodium spp. cells in red blood cells (RBCs) using hydrophilic-treated cyclic olefn copolymer (COC) plates was proposed. Oxygen plasma treatment was applied to COC plates in order to modify the surface wettability to hydrophilic using Samco RIE etcher RIE-10NR.

Polymer surface modification is an essential technique to achieve surface wettability improvement and direct substrate bonding in microfluidics fabrication. We offer plasma cleaners and UV-ozone cleaners as well as plasma etching equipment for this application. The paper below shows long-term stable hydrophilic surfaces of polymer materials (PMMA, COC, COP and PEEK) using UV-ozone treatment technologies.
UV/ozone Surface Modification for Long-term Stable Hydrophilic Surface of Polymer Microfluidic Devices

14 Aug

Scientific paper on MgO sensing membrane fabrication by Chang Gung University

Samco 2017 Customer, MgO, Samco Customer Publication, Silicon/Dielectrics PECVD, Surface Treatment

Magnesium Oxide (MgO) pHsensitive Sensing Membrane in Electrolyte-Insulator Semiconductor Structures with CF4 Plasma Treatment

Chyuan-Haur Kao1,3,4, Chia Lung Chang1, Wei Ming Su2, Yu Tzu Chen2, Chien Cheng Lu2,
Yu Shan Lee2, Chen Hao Hong2, Chan-Yu Lin4 & Hsiang Chen2
1 Department of Electronic Engineering, Chang Gung University, Taoyuan, 333, Taiwan, ROC.
2 Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, 545, Taiwan, ROC.
3 Kidney Research Center, Department of Nephrology, Chang Gung Memorial Hospital, Chang Gung University, College of Medicine, Taoyuan, Taiwan, ROC.
4 Department of Electronic Engineering, Ming Chi University of Technology, New Taipei City,
Taiwan, ROC.
Scientific Reports (2017) 7 7185  DOI:10.1038/s41598-017-07699-3

In this paper, MgO (Magnesium Oxide) based biosensors were fabricated for chemical solution sensing with high pH sensitivity. CF4 plasma treatment was carried out to shape nanostructures and stabilize the material properties of the MgO membrane. For the CF4 plasma treatment of MgO films and deposition of silicon based films, Samco PECVD system PD-220N was used.

Samco offers PECVD systems for plasma deposition of SiO2, SiNx, a-Si, DLC and etc. These films are used for passivation, barrier film and other purposes in various research fields. For more details of our process capabilities of plasma deposition technologies, please visit the process data pages below.
SiO2 PECVD Process Data
SiNx PECVD Process Data
SiO2 PECVD