Scientific Paper on Microdisc Fabrication from Tamkang University, Taiwan

January 7, 2016 Samco 2016 Customer, Photonic Devices, SAMCO Customer Publication, Silicon/Dielectrics Etch, SiNx Etch, SiO2 Etch

Photonic nanojet induced modes generated by a chain of dielectric microdisks

Cheng-Yang Liu, Chun-Ci Li
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, New Taipei City, Taiwan
Optik – International Journal for Light and Electron Optics (2016) 127, 1, pp 267–27

Samco Reactive Ion Etching (RIE) system was used for dielectric layer etching to fabricate a microdisc device.

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