Scientific Paper on Microdisc Fabrication from Tamkang University, Taiwan
Cheng-Yang Liu, Chun-Ci Li
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, New Taipei City, Taiwan
Optik – International Journal for Light and Electron Optics (2016) 127, 1, pp 267–27
Samco Reactive Ion Etching (RIE) system was used for dielectric layer etching to fabricate a microdisc device.