Scientific Paper on Microfluidics Fabrication Using Glass Dry Etching by National Tsing Hua University, Taiwan
DNA combing on low-pressure oxygen plasma modified polysilsesquioxane substrates for single-molecule studies
K. K. Sriram1,2,3 Chun-Ling Chang3 U. Rajesh Kumar1,4,5 and Chia-Fu Chou3,6,7
1 Nano Science and Technology Program, Taiwan International Graduate Program, Academia Sinica, Taipei 11529, Taiwan
2 Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30013, Taiwan
3 Institute of Physics, Academia Sinica, Taipei 11529, Taiwan
4 Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 10617, Taiwan
5 Department of Chemistry, National Taiwan University, Taipei 10617, Taiwan
6 Genomics Research Center, Academia Sinica, Taipei 11529, Taiwan
7 Research Center for Applied Sciences, Academia Sinica, Taipei 11529, Taiwan
Biomicrofluidics (2014) 8, 052102
SAMCO ICP Etch System was used for microchannel fabrication on fused silica glass substrates.
For more details of our glass dry etch technologies (SiO2, fused silica and quartz), please visit the page below.
SiO2 Dry Etching Process (RIE or ICP-RIE)