Scientific Paper on Wrinkled PDMS Film Fabrication from Nanjing University, China

November 11, 2012 Samco 2012 Customer, Other Materials Etch, PMMA Etch, Resist, SAMCO Customer Publication

Crack-free controlled wrinkling of a bilayer film with a gradient interface

Yan Xuana Xu Guoa Yushuang Cuia Changsheng Yuana Haixiong Gea Bo Cuib and Yanfeng Chena
National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, College of Engineering and Applied Sciences, Nanjing University, Nanjing, 210093, China
Department of Electrical and Computer Engineering, University of Waterloo, 200 University Avenue, West Waterloo, Ontario N2L3G1, Canada
Soft Matter (2012) 8, 9603

SAMCO RIE Plasma Etching System was used for plasma etching of silicon-containing resist and PMMA to fabricate wrinkled films.

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