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Samco Inc.
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Deposition Systems
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Deposition
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching
Atomic Layer Etching (ALE)
Compound Semiconductor Etching
GaN Etching
GaAs Etching
InP Etching
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Search:
Products
Deposition Systems
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching Systems
Atomic Layer Etching (ALE)
Inductively Coupled Plasma (ICP) Etching
Si Deep Reactive Ion Etching (DRIE)
Reactive Ion Etching (RIE) – Plasma Etching
Xenon Difluoride (XeF2) Etching
Surface Treatment Systems
Aqua Plasma®
Plasma Cleaning
UV Ozone Cleaning
Processes
Deposition
Atomic Layer Deposition (ALD)
Anode PECVD
Cathode PECVD
Etching
Atomic Layer Etching (ALE)
Compound Semiconductor Etching
GaN Etching
GaAs Etching
InP Etching
Silicon Etching & DRIE
Metal/Dielectric Etching
Failure Analysis
Surface Treatment
Aqua Plasma®
Plasma Cleaning
UV Ozone Cleaning
Markets
News & Events
Events
News
Samco Now
Technical Reports
Interviews
À la Carte
Tutorials
Disclosure
About
Company Overview
Global Locations
History
Contact
Product Info Request
Technical Support Request
Careers
Vol. 131
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Vol. 131
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