Scientific Paper on Nanostructure Fabrication Using a Carbon Nanotube Template From Korea University

May 22, 2016 Samco 2016 Customer, CNT Etch, Other Materials Etch, Samco Customer Publication

Sub-5 nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template

Ju Yeon Woo1, Hyo Han1, Ji Weon Kim1, Seung-Mo Lee2, Jeong Sook Ha3, Joon Hyung Shim1 and Chang-Soo Han1
1 School of Mechanical Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea
2 Department of Nanomechanics, Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery & Materials (KIMM), 156 Gajungbuk-ro, Yuseong-gu, Daejeon 305-343, Korea
3 Department of Chemical & Biological Engineering, Korea University Anam-Dong, Seongbuk-Gu, Seoul 136-713, Korea
Nanotechnology (2016) 27 265301 (7pp)

Samco RIE system was used for removal of single-walled carbon nanotubes (CNT) in an oxygen plasma.

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