Scientific Paper on Si-containing Film from Indian Institute of Technology Delhi Group

May 15, 2015 Samco 2015 Customer, a-Si PECVD, Samco Customer Publication, Silicon/Dielectrics PECVD

Swift heavy ion irradiation induced microstructural modification and evolution of photoluminescence from Si rich a-SiNx:H

R K Bommali1, S Ghosh1, G Vijaya Prakash1, D Kanjilal2, P Mondal3, A K Srivastava3 and P Srivastava1
1 Nanostech and Nanophotonics Laboratories, Department of Physics, Indian Institute of Technology Delhi, Hauz Khas, New Delhi 110 016, India
2 Materials Science Division, Inter-University Accelerator Centre (IUAC), Aruna Asaf Ali Marg, New Delhi 110067, India
3 Indus Synchrotron Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
Mater. Res. Express (2015) 2 046204

SAMCO PECVD system was used for silicon film deposition.