Swift heavy ion irradiation induced microstructural modification and evolution of photoluminescence from Si rich a-SiN_x:H

R K Bommali¹, S Ghosh¹, G Vijaya Prakash¹, D Kanjilal², P Mondal³, A K Srivastava³ and P Srivastava¹
1 Nanostech and Nanophotonics Laboratories, Department of Physics, Indian Institute of Technology Delhi, Hauz Khas, New Delhi 110 016, India
2 Materials Science Division, Inter-University Accelerator Centre (IUAC), Aruna Asaf Ali Marg, New Delhi 110067, India
3 Indus Synchrotron Utilisation Division, Raja Ramanna Centre for Advanced Technology, Indore 452 013, India
Mater. Res. Express (2015) 2 046204

SAMCO PECVD system was used for silicon film deposition.