Scientific Paper on Ring Resonator Fabrication Using SiN PECVD by Kyushu University
Feng Qiu, Andrew M. Spring, and Shiyoshi Yokoyama*
Institute for Materials Chemistry and Engineering, Kyushu University, 6-1 Kasuga-koen Kasuga-city, Fukuoka, 816-8580, Japan
ACS Photonics (2015) 2, 3 pp 405–409
Samco PECVD system was used for Si3N4 deposition to fabricate a ring resonator.
For more details of our SiNx PECVD process capabilities, please visit the page below.
SiNx PECVD Process