Scientific Paper on Surface Fluorination of Rutile-TiO2 Film by Ritsumeikan University

May 10, 2016 Samco 2016 Customer, Plasma Treatment, Samco Customer Publication, Surface Treatment, TiO2

Surface fluorination of rutile-TiO2 thin films deposited by reactive sputtering for accelerating response of optically driven capillary effect

Taizo Kobayashi1, Hironobu Maeda2, and Satoshi Konishi3
1 Ritsumeikan-Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
2 Graduate School of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
3 Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Japanese Journal of Applied Physics 55, 06GP03 (2016)

TiO2 thin films with the rutile phase were fluorinated using Samco RIE system to enhance the photoresponsivity.