Scientific Paper on Chemical Vapor Deposition Processing from Harvard University

December 11, 2015 Samco 2015 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Direct-liquid-evaporation chemical vapor deposition of smooth, highly conformal cobalt and cobalt nitride thin films

Jing Yanga, Kecheng Lia, Jun Fengb and Roy G. Gordona,b
a School of Engineering, Applied Sciences, Harvard University, Cambridge, MA 02138, USA
b Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA

SAMCO UV-Ozone cleaner at Harvard University was used to remove organic contaminants from samples.

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