Basic Plasma Research Kit
SAMCO’s Basic Plasma Research Kit (BP-1) is designed for diverse thin-film experiments using plasma chemical reactions. This system serves as an ideal educational tool, offering an introduction to the fundamental basics of plasma physics.
The system features a reaction chamber with parallel plate electrode that can process samples up to 100 mm. The electrode spacing can be manually adjusted from 10-40 mm.
The BP-1 has been used for plasma polymerization, surface modification, dry etching and thin film deposition. However as this is a fully manual system with minimal safety mechanisms, it is usually recommended for advanced users that would otherwise consider a “home-built” plasma system, or for kinetic studies of the plasma process using inert gases.
The standard system includes:
- Manual throttle valve for pressure control
- 2 rotameters for gases
- 200 W RF generator and manual matching network
- Mineral based rotary pump
Options include stage heating up to 400°C.