Process Solutions for SAW Device Manufacturing
SAMCO Inc. > Markets > Process Solutions for SAW Device Manufacturing
1. Electrode Formation (Metal Etching)
![Electrode Formation (Metal Etching)](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-01.gif?fit=350%2C350&ssl=1)
![Aluminum Etching for Electrode Formation](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Aluminum-Etching-2.jpg?fit=350%2C350&ssl=1)
![Aluminum Etching for Electrode Formation](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Aluminum-Etching.jpg?fit=350%2C350&ssl=1)
Aluminum Etching was performed using an ICP etch system.
The etched profile showed vertical sidewalls.
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
2. Photoresist Removal
![Photoresist Removal](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-02.gif?fit=350%2C350&ssl=1)
![Bench-top Plasma Cleaner](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2015/12/PC-1100-Chamber.jpg?fit=350%2C350&ssl=1)
![Plasma Asher Chamber](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2015/12/RIE-200C-Chamber.jpg?fit=350%2C350&ssl=1)
Samco offers plasma cleaning systems and RIE systems for photoresist plasma ashing.
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
3. Substrate Trimming (IDT Fabrication)
![Substrate Trimming](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-03.gif?fit=350%2C350&ssl=1)
![LiNbO3 LiTaO3 Etching](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/LiNbO3-LiTaO3-etching.jpg?fit=350%2C350&ssl=1)
![LiNbO3 LiTaO3 Etching](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/LiNbO3-LiTaO3-etching-3.jpg?fit=350%2C350&ssl=1)
LiNbO3 plasma etching was performed using an ICP etch system for fabrication of interdigital transducer (IDT), and smooth sidewalls were achieved. Other piezoelectric materials including quartz can be also processed for IDT fabrication.
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
4. Passivation Film Deposition
![Passivation Film Deposition](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-04.gif?fit=350%2C350&ssl=1)
![SiO2 Deposition Uniformity](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SiO2-Deposition-Uniformity.jpg?fit=350%2C350&ssl=1)
![SiO2 Gap Filling Without Void](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Gap-Filling-without-Void.jpg?fit=350%2C350&ssl=1)
Samco’s cathode PECVD systems give advantages of high deposition uniformity for batch processing.
9 point measurement of 10 mm wafer edge for 3 x Ø4-inch wafers shows high wafer-to-wafer SiO2 deposition uniformity around ±1.5 %.
Aluminum electrodes were covered with a SiO2 passivation film without void.
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
5. Contact Hole Formation
![Contact Hole Formation](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-05.gif?fit=350%2C350&ssl=1)
![Atmospheric Robot for Wafer Transfer](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Atmospheric-Robot-for-Wafer-Transfer.jpg?fit=350%2C350&ssl=1)
State-of-the-art robots will improve process throughput with quick wafer transfer.
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
7. Dicing
![Dicing for SAW Device Fabrication](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device-Process-06.gif?fit=350%2C350&ssl=1)
![Arrow](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Arrow.jpg?fit=50%2C92&ssl=1)
8. Surface Cleaning before Wire Bonding
![SAW Device](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/SAW-Device.jpg?fit=350%2C350&ssl=1)
![Plasma Cleaner for SAW Device Manufacturing](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/02/Plasma-Cleaner-for-SAW-Device-Manufacturing.jpg?fit=350%2C350&ssl=1)
![tabletop plasma cleaner](https://i0.wp.com/www.samcointl.com/opto/wp-content/uploads/2016/03/Plasma-Cleaner-Shelves.jpg?fit=350%2C350&ssl=1)
Samco’s bench-top plasma cleaners can process multiple wafers with additional shelves for surface cleaning.