Plasma Cleaners: Precision Substrate Cleaning
Plasma cleaning systems are designed for the cleaning of plastic microelectronic packages and lead frames as well as LCD circuit boards and other products. Samco’s solutions include compact systems for R&D and pilot production, as well as large-chamber plasma cleaning systems.
(Direct Plasma Treatment)
Three Different Process Modes
(RIE, Plasma and Downstream Modes)
Fully Automated Processing
Easy Operation with Touch Panel
Samco UV-Ozone Cleaners utilize a combination of ultraviolet light, high concentration ozone and a heated stage
to provide a completely dry and damage free cleaning process for material research and device fabrication.
Complete Dry Process
In-situ Ozone Generator and Stage Heating Control for Enhancing Organic Residue Removal
No Plasma-induced Charging and Physical Damage to Circuits
Equipped with Ozone Decomposition Catalyst Unit
Multiple System Lineup for R&D and Production