Category: Events

08 Jan

Samco Plasma Etching System RIE-10NR updates UIUC Material Research Lab

Megan Duncan 2024 Events, 2024 NEWS, Events

Samco reveals plans to install plasma etching system RIE-10NR early 2024 as the newest update to the Materials Research Lab (MRL) at the University of Illinois Urbana-Champaign (UIUC).

At the forefront of materials science research, the lab will implement RIE-10NR, a fully automatic reactive ion etching system capable of high-performance processing in a compact space. Known as a staple piece of equipment, the RIE-10NR has more than 30 years of continuous improvement since its initial launch, and 500 systems installed worldwide as of July 2023.

Director of Research Facilities at University of Illinois Urbana-Champaign’s MRL, Dr. Mauro Sardela commented “Samco … [was] very proactive in contacting our lab, visiting us and showcasing their product. [The company was] very flexible in finding the best product to fit our research needs and our current budget.” He also shared the future plans of the lab, stating that “We are hoping to upgrade our RIE capabilities to better support our base of more than 1,000 users. We hope to provide state-of-the-art etching uniformity in our test devices, combined to easy-to-use interface for our various students.” Overall, he wished “[Samco continues] to serve the microelectronics market with state-of-the-art etching and coating tools.”

Tsukasa Kawabe, President and COO of Samco, stated “In the semiconductor manufacturing world, numerous prominent names and corporations exist, but far less willing to work to suit each and every need of a client. Here at Samco, we specialize in making systems like the RIE-10NR, which has an exceptionally small footprint, is cost-effective, boasts exceptional reliability, and benefits from more than three decades of continuous improvements. We are always looking for ways to add value to both the world and for our clients. We are confident MRL at UIUC will be satisfied with the RIE-10NR system.”

About Materials Research Lab at University of Illinois Urbana-Champaign

The Materials Research Lab (MRL) at UIUC is one of the largest shared-instrumentation facilities in the US, promoting interdisciplinary research and education for students, staff, faculty, and researchers with over 200 types of advanced instruments and cutting-edge equipment. The MRL Micro/Nanofabrication Facility is fully a user-supported facility with two class 100 clean rooms totaling 1,900 square feet with instrumentation for micro/nano-fabrication projects including wet and chemical etching, deposition, spin coaters, mask aligners, optical, 3D and electron beam lithography.

About Samco Inc.

Samco Inc. (TSE: 6387) stands for Semiconductor And Materials Company, is a leading manufacturer of processing equipment for the semiconductor and related industries founded by Mr. Osamu Tsuji in Kyoto, Japan in 1979. Over the past forty-five years, more than 4,500 Samco systems have been installed and used in 35 different countries. Its equipment and thin film technology are widely adopted in the fabrication of semiconductor devices, including SiC/GaN power/RF devices, GaAs VCSELs, InP Laser Diodes, MEMS, BAW/SAW Filters TSVs, advanced packaging, and so on.

Learn more at .

Company Contacts:


Public Relations

Phone: 81-75-621-7841


14 Jan

Visit Samco Booth at IEEE MEMS 2020

Samco 2020 Events, Events

The 33rd International Conference on Micro Electro Mechanical Systems
(IEEE MEMS 2020)

When:  18 – 22, 2020

Where: Vancouver Convention Centre, Canada

Booth: 12

Samco’s systems are highly regarded by researchers and manufacturers for their proven reliability and cost-effective solutions.  As we aim to expand further into the MEMS market, our booth will focus on the Deep Si Etching systems, as well as showcase the latest data for our Aqua Plasma® systems and more.


If you’re interested in meeting with us, contact us to make an appointment.

Come see Samco booth at IEEE MEMS 2020.

20 Mar

Visit Samco Booth at CS International, Brussels

Samco 2018 Events, Events

Date : April 10 – 11, 2018
Location : Sheraton Brussels Airport Hotel, Brussels, Belgium

CS International is one of the largest conference on compound semiconductor device and process technologies.
As a process innovator of compound semiconductor materials such as InP, GaAs and GaN,
Samco joins the conference and holds an exhibition booth.

In this year, our target process technologies are
1. InP ridge profile etching for laser diode fabrication
2. GaAs mesa profile etching for VCSEL fabrication
3. GaN etching for laser diode and power device fabrication

We would be happy to discuss more details to solve your process challenges in device fabrication.

21 Feb

Visit Samco Booth at SEMICON China 2018

Samco 2018 Events, Events

When: March 14 – 16, 2018

Where: Shanghai New International Expo Centre, China

Booth: 2511

Visit Samco booth at SEMICON China 2018.

This year we will focus on these topics with new booth design.
· Compound semiconductor etching such as InP, GaAs and GaN
· Silicon Deep RIE for MEMS device fabrication
· AlOx/SiO2 ALD
· Depassivation for failure analysis

If you’re interested in meeting with us, contact us to make an appointment.

SEMICON China 2018

26 Oct

Visit us at SEMICON Europa 2017

Samco 2017 Events, Events

When: November 14 – 17, 2017

Where: Messe München Munich, Germany

Booth: B1-412

Visit Samco at SEMICON Europa 2017, which will be held at Messe München Munich, Germany.

This year we will focus on these topics with new booth design.
· SiC/GaN plasma etching technology for next-generation power devices
· III-V (InP/GaAs/GaN) and silicon plasma etching technology for laser diodes
· Silicon Deep RIE technology for MEMS device fabrication

If you’re interested in meeting with us, contact us to make an appointment.

semicon europa 2017 booth design

01 Sep

Visit Samco’s Booth at SEMICON Taiwan 2017

Samco 2017 Events, Events

When: September 13 – 15, 2017

Where: Taipei Nangnag Exhibition Center, Taipei, Taiwan

Booth: 338 (→Floor Map)

Visit Samco at SEMICON Taiwan 2017, which will be held at the Taipei Nangnag Exhibition Center in Taipei, Taiwan.

Samco joins Taiwan’s largest microelectronics trade show every year to communicate with customers who are looking for advanced processing technology for microelectronics manufacturing.  This year we will focus on process solutions for MEMS, TSV, Plasma Dicing, FOWLP (Fan Out Wafer Level Package) and Failure Analysis.

If you’re interested in meeting with us, contact us to make an appointment. Semicon Taiwan 2017

16 Jan

Samco SiC Power Device Seminar in Shanghai, China will be held on March 13 2017

Samco 2017 Events, Events

Samco SiC Power Device Seminar in Shanghai, China

Day: March 13, 2017
Venue: Fudan University Yifu Hall
Registration Fee: Free

● “New Materials and Different Field Technologies are Expanding the Semiconductor World” – key note speech –
Hidemi Takasu
ROHM Co., Ltd. Colleague (former managing director)& Tsinghua University Guest Professor
● “Advances in SiC Epitaxy and Devices”
Dr.Feng Zhang
Global Power Technology Co., Ltd. CTO
● “Introduction of Samco”
Jianhui Zhou
Samco Inc. Shanghai Office
● “Application Issues and Packaging for Wide Band Gap Devices”
Prof.Xu Yang
Xi’an Jiaotong University
● “Introduction of Advanced SiC Etching Process and Dry Etching System”
Chikashi Oshige
Samco Inc. R&D division
● “Nanofabrication and its Applications in Basic Scientific Study”
Prof.Yifang Chen
Fudan University

This seminar’s main theme is “Process Technology and Applications of New Generation SiC Power Devices”.
Samco provides SiC plasma etching systems and processes to industry customers for SiC trench MOSFET fabrication.
SiC Power Device Seminar Flyer (PDF) >>

If you are interested in attending this seminar, please proceed to the registration form below.
Seminar Registration Form >>

16 Jan

Samco MEMS Workshop in New Delhi, India will be held on March 8 2017

Samco 2017 Events, Events

Samco MEMS Workshop 2017 in New Delhi, India

Day: March 8, 2017
Venue: Lecture Hall Complex, IIT Delhi


  • Prof. Hiroshi Toshiyoshi, University of Tokyo, Japan
    – “MEMS for Optics, Microwave and Energy Harvester Applications”
  • Prof. V. Ramgopal Rao, IIT Delhi
    – “Polymer MEMS: Opportunities and Challenges”
  • Dr. Surinder Singh, Semi-Conductor Laboratory
    – “MEMS Sensors for Space Applications”
  • Prof. Rudra Pratap, CeNSE, IISc
    – “Dynamic MEMS Sensors”
  • Tomoyuki Nanoka, Samco Inc.
    – “Samco Si-DRIE System Introduction”

This workshop aims at providing a broad overview on MEMS & NEMS plasma applications which are fundamental techniques for nanofabrication in R&D. Samco held its first MEMS workshop at IIT Bombay in February 2016, and this is the second workshop in India.
MEMS Workshop Flyer (PDF) >>

If you are interested in attending this workshop, please proceed to the registration form below.
Workshop Registration Form >>

09 Jan

Meet us at MEMS 2017

Samco 2017 Events, Events

Samco holds a booth at MEMS 2017 conference at Las Vegas, USA.

Date : January 22 – 26, 2017
Location : Rio Las Vegas Hotel and Casino, Las Vegas, US
Booth : 5

We will show our latest updates on MEMS device processing technologies.
· Deep silicon etching (the Bosch process) for MEMS structure fabrication
· Fine and nano-scale dry etching technologies (RIE and ICP-RIE) of various materials
– silicon, SiO2, III-V, metals, polymers and other materials
· PECVD technologies (SiO2 and SiNx) for hark mask fabrication
· Plasma cleaners and UV-ozone cleaners for photoresist ashing, surface cleaning and modification
· XeF2 etching system for reliable dry release of MEMS structure

If you are interested in discussion on our process technologies and capabilities, please visit our booth (No. 5).

Go to MEMS 2017 website