Meet Team SAMCO: Your Semiconductor Equipment Experts

 SAMCO Inc. > Company Overview

Who We Are


As a Leading Semiconductor and Materials COmpany, Samco is dedicated to the innovation of Material Processing and Device Fabrication

  • Samco First system



Samco started in 1979 as a venture company in a small garage of a house in Kyoto, Japan. It delivered its first Plasma Chemical Vapor Deposition product for a-Si solar cells research in the same year. From its modest beginnings, Samco has now grown into a multi-million dollar worldwide corporation with more than 150 employees delivering process solutions for both research and production to our “Partners in Progress”. Samco continues to keep its business venture spirit.

Core Technologies

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Surface Treatment

 Samco provides thin film processing solutions using three core technologies.

  • Samco Systems

Quick Facts About Samco


 Over the last 45 years, Samco has provided over 4,500 thin film solutions to our global partners in 35 countries.

Research Collaboration


Samco regards technology development as one of the keys for the company’s continued success and expansion. Our material processing technologies have evolved in research collaboration with various research institutes. Samco is an industry partner of Low Energy Electronic Systems (LEES) Consortium at Singapore-MIT Alliance for Research and Technology (SMART). Our systems (PECVD, RIE and ICP-RIE) are used for state-of-the-art research of III-V and Silicon CMOS process integration for next-generation semiconductor devices.


Osamu Tsuji, President & CEO

 Chairman & Chief Executive Officer
Osamu Tsuji

Osamu Tsuji is the founder of Samco. Before starting Samco in September 1979, he worked as a research scientist at NASA Ames Research Center. He is a firm believer of the “Kyoto-style” corporate management, manufacturing philosophy and technology innovation. With this belief, Mr. Tsuji has grown Samco into a multinational corporation offering leading edge process solutions.

Mr. Tsuji has dedicated his effort to technology development of plasma processing for over 40 years. In 2012, he was named Conference and Organizing Committee Chairperson of the 11th Asia Pacific Conference on Plasma Science and Technology (APCPST 2012) Conference. For his contribution to the plasma processing technology, in 2013, he received 15th Special Award of Plasma Science for Material from 153rd Plasma Science for Material Committee, Japan Society for the Promotion of Science. He is the first award winner from industry sector. He has also published 70 papers and co-edited 4 books.

While serving as Chairman and Chief Executive Officer of Samco, Mr. Tsuji has dedicated his passion to energize business ventures in Japan. He is serving as the Chairman of Kyoto City Venture Companies Evaluation Committee and has supported many promising startups.

  • Samco Building-blue