• SAMCO Wafer Transfer Robot
  • SAMCO UV-Ozone

Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production

 deposition, etching & surface treatment

company history, core technologies & more

plasma etch & PECVD solutions for device fabs

Product Portfolio

Deposition Icon
Etching Icon
Surface Treatment

Plasma Etching & PECVD Process Solutions

DRIE for MEMS fabrication
Plasma Dicing of Silicon and III-V (GaAs/InP/GaN)
GaN Power Device
SiC trench etching for SiC power device
Photoresist Removal
Low temperature PECVD for SiO2 and SiN plasma deposition
Cathode PECVD
  • SAMCO Engineer


SAMCO Inc. is a semiconductor equipment company that provides process systems for both R&D and production. As a pioneer in the industry we have developed advanced process solutions using technologies such as Atomic Layer Deposition (ALD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Metal Organic Chemical Vapor Deposition (MOCVD), Reactive Ion Etch (RIE), Inductively Coupled Plasma (ICP), and UV-Ozone Cleaning.

SAMCO Inc. possesses over 35 years of process knowledge, and experience in providing cutting edge, extremely reliable deposition, etching, cleaning and surface treatment systems to our customers in the worldwide electronics industry. We take pride in partnering with our customers to achieve the most challenging process goals.

Latest NEWS & Events

Visit Samco’s Booth at SEMICON JAPAN 2016
Come see us at SEMICON JAPAN 2016 which will be held at Tokyo Big Sight, Tokyo.
Samco is presenting a paper on plasma surface modification at PacSurf 2016
We have a poster presentation titled “Selectivity of Plasma Treatment Effects on Wettability Modulation between Silicon, Glass, Polyimide and PMMA, Using Several O2, CF4 and CHF3 Gas Ratios“.
Deputy Prime Minister of Liechtenstein Meets with Samco Chairman and CEO Osamu Tsuji
Deputy Prime Minister of Liechtenstein Thomas Zwiefelhofer invited Samco Chairman and CEO Osamu Tsuji to the country’s government building in order to express his gratitude to Samco for making Liechtenstein its sales and service base in Europe.

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