Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production
company history, core technologies & more
process equipment for
deposition, etching & surface treatment
plasma etch & PECVD process solutions
for device labs & fabs
experienced etch & PECVD technologies
of Si, SiO2, SiNx, III-V, metals & more
Latest NEWS & Events
Scientific paper on Si subwavelength grating from Tohoku University, Japan
Micro-fabricated Si subwavelength grating for frequency-domain THz beam steering covering the 0.3–0.5 THz frequency band Kohei Chiba, Taiy...Scientific paper on polycrystalline Si film from Colorado School of Mines
Pinhole electrical conductivity in polycrystalline Si on locally etched SiNy/SiOx passivating contacts for Si solar cells C.L. Anderson a b,...Visit the Samco Booth (#223) at CS MANTECH May 15-18, 2023 in Orlando, Florida
The CS MANTECH 2023 International Conference on Compound Semiconductor Manufacturing Technology will be located at the Hyatt Regency Grand ...Join us for Photonic Integration Week at Valencia, Spain
Samco will have a booth at 6th Photonic Integration Week conference at at the Universitat Politècnica de València Campus from 20th to 22nd...Samco Unveils Plasma Enhanced ALD System for SiC and GaN Power Devices
Samco, a leading manufacturer of etching, deposition and surface treatment processing equipment for the semiconductor and related ind...Come Visit Samco Booth 1533 at SEMICON West 2022
Come visit Samco at Semicon West Booth 1533. We will introduce New plasma etch cluster tools and ALD equipment. If you are interested in dis...Scientific paper on energy-conversion device from Politecnico di Torino
Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices Alberghini, M., Morciano, M., Giardino, M., Perrucci, F., Scalt...Scientific paper on GaP grating fabrication from University of Ottawa
Scalable Fabrication of Nanogratings on GaP for Efficient Diffraction of Near-Infrared Pulses and Enhanced Terahertz Generation by Optical R...Product Portfolio
Material Processing Data (Plasma Etch & PECVD)
About Samco
Samco Inc. is a semiconductor equipment company that provides process systems for both R&D and production. As a pioneer in the industry, we have developed advanced process solutions using technologies such as Atomic Layer Deposition (ALD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Reactive Ion Etch (RIE), Inductively Coupled Plasma (ICP) Etch, and UV-Ozone Cleaning.
Samco possesses over 40 years of process knowledge, and experience in providing cutting edge, extremely reliable deposition, etching, cleaning and surface treatment systems to our customers in the worldwide electronics industry. We take pride in partnering with our customers to achieve the most challenging process goals.
