• SAMCO Wafer Transfer Robot
  • SAMCO UV-Ozone

Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production

 deposition, etching & surface treatment

company history, core technologies & more

plasma etch & PECVD solutions for device fabs

Product Portfolio

Deposition Icon
Etching Icon
Surface Treatment

Plasma Etching & PECVD Process Solutions

DRIE for MEMS fabrication
Plasma Dicing of Silicon and III-V (GaAs/InP/GaN)
GaN Power Device
SiC trench etching for SiC power device
Photoresist Removal
Low temperature PECVD for SiO2 and SiN plasma deposition
Cathode PECVD
  • SAMCO Engineer


SAMCO Inc. is a semiconductor equipment company that provides process systems for both R&D and production. As a pioneer in the industry we have developed advanced process solutions using technologies such as Atomic Layer Deposition (ALD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Metal Organic Chemical Vapor Deposition (MOCVD), Reactive Ion Etch (RIE), Inductively Coupled Plasma (ICP), and UV-Ozone Cleaning.

SAMCO Inc. possesses over 35 years of process knowledge, and experience in providing cutting edge, extremely reliable deposition, etching, cleaning and surface treatment systems to our customers in the worldwide electronics industry. We take pride in partnering with our customers to achieve the most challenging process goals.

Latest NEWS

Visit Samco’s Booth at ISTFA 2016
Come see us at the International Symposium for Testing and Failure Analysis 2016 exhibition which will be held at the Fort Worth Convention Center in Fort Worth, Texas, USA
Samco is presenting a paper on deep GaAs plasma etching at AVS 63rd International Symposium
We have a poster presentation titled “Deep GaAs Etching with V-shaped Trench Profile Using Inductively Coupled Plasma Technology“.
Samco opens new office in Malaysia, strengthens presence in Southeast Asia
We opened Malaysia branch office on Aug. 10, 2016 in Petaling Jaya, a suburb of Kuala Lumpur.

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