• SAMCO Wafer Transfer Robot
  • SAMCO RIE-10NR
  • SAMCO UV-Ozone

Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production

 deposition, etching & surface treatment

company history, core technologies & more

plasma etch & PECVD solutions for device fabs

Product Portfolio

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Surface Treatment

Plasma Etching & PECVD Process Solutions

DRIE for MEMS fabrication
GaN Power Device
SiC trench etching for SiC power device
Photoresist Removal
HB LED
Cathode PECVD
Low temperature PECVD for SiO2 and SiN plasma deposition
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  • SAMCO Engineer

About SAMCO

SAMCO Inc. is a semiconductor equipment company that provides process systems for both R&D and production. As a pioneer in the industry we have developed advanced process solutions using technologies such as Atomic Layer Deposition (ALD), Plasma Enhanced Chemical Vapor Deposition (PECVD), Metal Organic Chemical Vapor Deposition (MOCVD), Reactive Ion Etch (RIE), Inductively Coupled Plasma (ICP), and UV-Ozone Cleaning.

SAMCO Inc. possesses over 35 years of process knowledge, and experience in providing cutting edge, extremely reliable deposition, etching, cleaning and surface treatment systems to our customers in the worldwide electronics industry. We take pride in partnering with our customers to achieve the most challenging process goals.

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