ZnSe Dry Etching Process (ICP-RIE)

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Material Properties and Applications of Zinc Selenide (ZnSe)

Zinc Selenide (ZnSe) is a light-yellow, solid compound comprising zinc (Zn) and selenium (Se).

This material shows low absorption at infrared wavelengths, and it is mainly used for transmissive optics components such as lenses, windows of CO2 laser. Also, this material is used as a material of laser oscillators and power amplifiers.

ZnSe (Periodic Table)

Anisotropic ZnSe Etching

Highly anisotropic ZnSe etching was achieved using photoresist mask.

Sidewall Angle : 85°
Etch Rate : 95 nm/min
Etch Selectivity : 3.7 (over photoresist)

ZnSe Etching

 System Lineup for ZnSe Dry Etching

ICP Etch Systems

– Multiple system lineup
– ICP plasma sources for excellent etch process control

ICP Etch Systems for ZnSe Plasma Etching


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