Scientific paper on polycrystalline Si film from Colorado School of Mines

June 20, 2023 Samco Samco Customer Publication, Si Etch, Silicon/Dielectrics Etch, Solar Cell

Pinhole electrical conductivity in polycrystalline Si on locally etched SiNy/SiOx passivating contacts for Si solar cells

C.L. Anderson a b, H.L. Guthrey b, W. Nemeth b, C.-S. Jiang b, M.R. Page b, P. Stradins a b, S. Agarwal a b

Department of Chemical and Biological Engineering, Colorado School of Mines, Golden, CO, 80401, USA
National Renewable Energy Laboratory, Golden, CO, 80401, USA

Materials Science in Semiconductor Processing, Volume 165, 2023, 107655,
ISSN 1369-8001,

Boron-doped polycrystalline Si on locally etched silicon nitride/silicon oxide (PLENO) passivating contacts was studied for monocrystalline Si (c-Si) solar cell application. Samco open-load RIE system RIE-10NR was used for silicon etching.