Scientific Paper on Flexible Touch Sensors and Organic Transistors from University of Tokyo

February 29, 2016 Samco 2016 Customer, MEMS, Samco Customer Publication

300-nm Imperceptible, Ultraflexible, and Biocompatible e-Skin Fit with Tactile Sensors and Organic Transistors

Robert A. Nawrocki1, Naoji Matsuhisa1,2, Tomoyuki Yokota1 and Takao Someya1
1 Department of Electrical Engineering and Information Systems, School of Engineering, The University of Tokyo, Bunkyo-ku, Tokyo, Japan
2 Advanced Leading Graduate Course for Photon Science, Bunkyo-ku, Tokyo, Japan
Advanced Electronic Materials (2016)

Samco open-load RIE etcher was used for contact hole formation of encapsulation layers.