Scientific Paper on Microfluidic Chip Fabrication from AIST
Hiroki Ashibaa, Makoto Fujimakia, Koichi Awazuv, Torahiko Tanakab and Makoto Makishimab
a Electronics and Photonic Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
b Division of Biochemistry, Department of Biomedical Sciences, Nihon University School of Medicine, 30-1 Oyaguchi-kamicho, Itabashi, Tokyo 173-8610, Japan
Sensing and Bio-Sensing Research 2016 Volume 7, March 2016, Pages 121-126
Samco ICP etcher was used to fabricate a mold template of microfluidic chips by silicon plasma etching.
For our process capabilities of silicon plasma etching, please visit the process data page below.
Si Dry Etching Process (RIE, ICP-RIE or XeF2 Etch)