Scientific Paper on Nano-pillar Array Formation Using Silicon Plasma Etching by National Taiwan University
Periodic Si nanopillar arrays by anodic aluminum oxide template and catalytic etching for broadband and omnidirectional light harvesting
Hsin-Ping Wang1, Kun-Tong Tsai1,2, Kun-Yu Lai1, Tzu-Chiao Wei1, Yuh-Lin Wang2 and Jr-Hau He1
1Institute of Photonics and Optoelectronics, & Department of Electrical Engineering, National Taiwan University,
Taipei 10617, Taiwan
2Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei, Taiwan
Optics Express (2012) 20,S1, pp. A94-A103
Samco RIE etcher was used for silicon nanopillar fabrication by silicon plasma etching against anodic aluminum oxide (AAO) mask.
For more information on our silicon plasma etching process capabilities including the Bosch Process etching, please visit the process data pages below.
Silicon Plasma Etching (RIE or ICP Etch)
Silicon Deep Etching Using the Bosch Process
For more detail specs of our RIE etch equipment, please visit the product page below.
RIE Plasma Etcher