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Compound Semiconductor Wafer
MO-CVD
GaN Epitaxial Growth
Plasma CVD
PD-220LC
Mask formation for implanting
Photolithography
Dry Etching
RIE-200iPC
RIE-200LC
Mask Etching
Ion Implanting
Mask Removal
Recess Formation
Electrode Formation
Protection Film Deposition
Contact Hole Etching
Glue Wafer on Support
Via Hole Formation
*Wafer Cooling Required
Dry Cleaning
PC-1100
UV-300HC
Dicing and Packaging
RF Device for Mobile Phone
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