Since our establishment in 1979 SAMCO has developed a wealth of dry etching
expertise. Today our product line includes, open-load, load-lock, and cassette type systems
for both R&D and Mass Production customers.
- Bench-top RIE system
- Process up to 4" wafers
- Low cost of ownership
- Failure analysis applications
- Process up to 8" wafers
- Multi-step recipe storage
- UL Certified
- Load-lock dry etching system
- Processes up to 8" wafers
- Small footprint
- Multi-step recipe storage
- Fully automated control
- Process up to 12" wafers
- Multi-step recipe storage
- SEMI-S2 Certified
- Fully automated control
- Process up to 4" wafers
- Multi-step recipe storage
- Production type RIE system
- Stainless steel chamber
- Cassette-to-cassette system
- Process up to 8" wafers
- Features a dual-arm robot
- Load-lock dry etching system
- Processes up to 8" wafers
- Cassette-to-cassette system
- Large 600mm x 600mm sample stage
- batch processing
- 5KW RF generator
- Up to 4 gas lines (MFC)
>
Etching systems
> Reactive Ion Etching Systems
