Plasma Etching Systems, DRIE Systems, ICP Etching, PECVD and Reactive Ion Etching Systems

SAMCO, Inc. is a process equipment company that develops and manufactures a wide variety of unique deposition, etching, and surface treatment systems for a worldwide network of major industrial customers and academic facilities. We provide process expertise and turnkey systems to major manufacturers in the compound semiconductor, optoelectronics, MEMS and other industries.

More about SAMCO

Headlines

Browse News and Events

December 2007
- “Samco and Tsinghua University thin film technical seminar” in Beijing where technical papers were presented and discussed in detail... [more]

- SAMCO held a ceremony for the construction its second Research and Development Center ... [more]

- SAMCO has announced the release of a new high-density ICP etching system, which is specifically designed for nano-scale etching of compound semiconductor materials. [more]

November 2007
- SAMCO received an order for an RIE-101iPH system from National Cheng Kung University in Taiwan for their MEMS applications.

- A leading LED manufacturer in Taiwan purchased 5 SAMCO systems (three SAMCO RIE-230iPC and two PD-4800 systems.

- SAMCO received an order for a RIE-200iPC system from an LED company in Taiwan for high-volume manufacturing.

October 2007
- National Tsing Hua University in Taiwan placed an order for a SAMCO PC-300 (Plasma Cleaner) system.

- A leading LED manufacturing company in Taiwan placed an order for a SAMCO RIE-200iPC system for high volume manufacturing of LEDs.

Product Highlights

Browse Products

High-Rate BOSCH Etching System

The SAMCO RIE-800iPB is specifically designed for the BOSCH process to achieve superior performance for high-speed deep vertical etching of silicon for MEMS applications.... Details

Compound Semiconductor ICP Etching System

SAMCO's RIE-140iP is a single wafer ICP etching system especially designed for compound semiconductor materials. This system features SAMCO's latest ICP plasma source technology which generates stable high-density plasma.... Details

Plasma-Enhanced CVD System

The SAMCO PD-220NA is a unique PECVD system designed for the deposition of silicon-based thin films (SiO₂, Si₃N₄, SiO_xN_y, a-Si:H)... Details

Applications

Browse Applications

SPECIAL UNIVERSITY PRICING - Please call for more information toll free:

(877) SAMCO-79
(877) 726-2679