Plasma cleaning systems are designed for the cleaning of
plastic microelectronic packages and lead frames as well as LCD circuit boards and other products.
SAMCO's solutions include compact systems for R&D and pilot production, as well as high throughput
mass production systems.
- RIE and Plasma modes
- Multi-step recipe storage
- 100 recipes
- Cleaning of plastic packages
- Removal of organics
- Three processing modes (RIE, Plasma & downstream)
- Multiple process shelves
- Recipe storage
- Compact footprint
- Up to 50x200mm samples
- Cleaning of lead frames
- High throughput (~12 sec./substrate)
- User-friendly touch panel
- Cleaning of glass substrates
- Cleaning of plastic packages
- Process up to 500x500mm substrates
- Excellent uniformity
> Cleaning Systems
> Plasma Cleaners
