SAMCO's line of UV-Ozone Cleaners utilize a combination of ultraviolet light,
high concentration ozone and a heated stage to provide a completely dry and damage free cleaning
process.
- Compact bench-top system
- Heated sample stage
- Process up to 6" wafers
- Low cost
- Compact bench-top system
- Drawer loaded
- Process up to 8" wafers
- Heated sample stage
- Compact bench-top system
- Process up to 12" wafers
- Rotating and heated stage
- Two ozone generators
- Process up to 300mm wafers
- Heated sample stage
- High-concentration ozone generators
- Drawer loaded
- Cassette-to-cassette operation
- Temperature control (Ambient to 300°C)
- High-concentration ozone generators
- Two cassettes with 12 trays/cassette
> Cleaning Systems
> UV-Ozone Cleaners
