Basic Plasma Research Kit
The BP-1 is a basic plasma research system that is intended to be used for experiments of various thin films using plasma chemical reactions, and is the ideal system to teach students the fundamental basics of plasma physics.
The system features a reaction chamber with parallel plate electrode that can process samples up to 100 mm. The electrode spacing can be manually adjusted from 10-40 mm.
The BP-1 has been used for plasma polymerization, surface modification, dry etching and thin film deposition. However as this is a fully manual system with minimal safety mechanisms, it is usually recommended for advanced users that would otherwise consider a “home-built” plasma system, or for kinetic studies of the plasma process using inert gases.
The standard system includes:
- Manual throttle valve for pressure control
- 2 rotameters for gases
- 200 W RF generator and manual matching network
- Mineral based rotary pump
Options include stage heating up to 400°C.