Category: Plasma Treatment
Alberghini, M., Morciano, M., Giardino, M., Perrucci, F., Scaltrito, L., Janner, D., Chiavazzo, E., Fasano, M., Asinari, P., Textured and Rigid Capillary Materials for Passive Energy-Conversion Devices. Adv. Mater. Interfaces 2022, 2200057. https://doi.org/10.1002/admi.202200057
Samco RIE system RIE-10NR was used for oxygen plasma treatment for surface functionalization in fabrication of passive energy-conversion devices.
Functional analysis of human brain endothelium using a microfluidic device integrating a cell culture insert
Shigenori Miura1, Yuya Morimoto2, Tomomi Furihata3 and Takeuchi1,2,4
1 Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
2 Department of Mechano-Informatics, Graduate School of Information Science and Technology, The University of Tokyo, Tokyo, Japan
3 Laboratory of Clinical Pharmacy and Experimental Therapeutics, School of Pharmacy, Tokyo University of Pharmacy and Life Sciences, Tokyo, Japan
4 International Research Center for Neurointelligence (WPI-IRCN), The University of Tokyo Institutes for Advanced Study (UTIAS), The University of Tokyo, Tokyo, Japan
APL Bioengineering 6, 016103 (2022); https://doi.org/10.1063/5.0085564
Aqua Plasma Treatment was used for PDMS/PDMS bonding microfluidic device fabrication. Samco Aqua Plasma technology for polymer surface activation and bonding without adhesives can be found in the following webpage.
On-chip cell analysis platform: Implementation of contact fluorescence microscopy in microfluidic chips
Hiroaki Takehara1, Osawa Kazutaka2, Makito Haruta2, Toshihiko Noda2, Kiyotaka Sasagawa2, Takashi Tokuda2 and Jun Ohta2
1 Department of Materials Engineering, Graduate School of Engineering, The University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan
2 Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
AIP Advances 7, 095213 (2017)
In this research, on-chip cell analysis platform for integrating contact fluorescence microscopy was performed using microfluidic chips. In microfluidic device fabrication, PDMS and ultra-thin glass substrates were bonded using exposure to oxygen plasma. Samco RIE etcher was used for oxygen plasma treatment of the substrates.
Samco offers plasma treatment technologies for microfluidics fabrication. Unique plasma processes enable plasma bonding of substrates such as COP and glass without microchannel pattern collapse because there is no need to implement mechanical pressing and heating for bonding. For more details, please visit the process page below.
Plasma Treatment & Bonding for Polymer Microfluidics
Hydrophilic-treated plastic plates for wide-range analysis of Giemsa-stained red blood cells and automated Plasmodium infection rate counting
Muneaki Hashimoto1, Shouki Yatsushiro1, Shohei Yamamura1, Masato Tanaka1, Hirokazu Sakamoto1,3, Yusuke Ido1, Kazuaki Kajimoto1, Mika Bando2, Jun‑ichi Kido2 and Masatoshi Kataoka1
1Health Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), 2217‑14, Hayashi‑cho, Takamatsu, Kagawa 761‑0301, Japan.
2Department of Periodontology and Endodontology, Institute of Health Biosciences, The University of Tokushima Graduate School, Institute of Health Biosciences, 3‑18‑15 Kuramoto, Tokushima 770‑8504, Japan.
Malar J (2017) 16 321
As a new method of malaria diagnostics, the count of Plasmodium spp. cells in red blood cells (RBCs) using hydrophilic-treated cyclic olefn copolymer (COC) plates was proposed. Oxygen plasma treatment was applied to COC plates in order to modify the surface wettability to hydrophilic using Samco RIE etcher RIE-10NR.
Polymer surface modification is an essential technique to achieve surface wettability improvement and direct substrate bonding in microfluidics fabrication. We offer plasma cleaners and UV-ozone cleaners as well as plasma etching equipment for this application. The paper below shows long-term stable hydrophilic surfaces of polymer materials (PMMA, COC, COP and PEEK) using UV-ozone treatment technologies.
UV/ozone Surface Modification for Long-term Stable Hydrophilic Surface of Polymer Microfluidic Devices
Consequences of plasma oxidation and vacuum annealing on the chemical properties and electron accumulation of In2O3 surfaces
Theresa Berthold1, Julius Rombach2 Thomas Stauden1 Vladimir Polyakov3
Volker Cimalla3 Stefan Krischok1 Oliver Bierwagen2 and Marcel Himmerlich1
1 Institut fur Mikro- und Nanotechnologien MacroNano, Technische Universit€at Ilmenau, PF 100565, 98684 Ilmenau, Germany
2 Paul-Drude-Institut fur Festk€orperelektronik, Hausvogteiplatz 5–7, 10117 Berlin, Germany
3 Fraunhofer-Institut fur Angewandte Festk€orperphysik, Tullastraße 72, 79108 Freiburg, Germany
Journal of Applied Physics 120, 245301 (2016)
Indium Oxide (In2O3) is used for metal contacts of electronic devices. It is known that defects (oxygen vacancies) and impurities (adsorbates) of In2O3 films change electron concentration. In previous papers, surface treatment techniques using plasma technologies were investigated to reduce the defects and impurities of In2O3 films.
In this paper, Samco ICP plasma etching tool at Paul-Drude-Institut was used for plasma surface oxidation of In2O3, and the samples were treated by subsequent vacuum annealing. It was found that oxygen plasma treatment reduced adsorbed carbon impurities and removed surface defect states, attributed to oxygen vacancies.
Scientific Paper on Organic Rectifying Diode Fabrication Using Gold Plasma Treatment by University of Tokyo
A Mechanically Durable and Flexible Organic Rectifying Diode with a Polyethylenimine Ethoxylated Cathode
Naoji Matsuhisa, Hiroaki Sakamoto, Tomoyuki Yokota, Peter Zalar, Amir Reuveny, Sunghoon Lee and Takao Someya
Electrical and Electronic Engineering and Information Systems, University of Tokyo
7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
Advanced Electronic Materials Volume 2, Issue 10, October 2016
Flexible organic diode device fabrication is performed using Samco process equipment. Samco plasma cleaner PC-300 was used for wettability improvement of polyethylenimine ethoxylated (PEIE) surfaces and for work function improvement of gold (Au) electrode.
Someya lab, University of Tokyo is one of Samco plasma cleaner customers. Our plasma cleaner is used for organic transistor fabrication, and they have published several papers on cutting-edge flexible MEMS devices.
Go to Someya lab website.
Samco plasma cleaners are versatile tools for plasma treatment and cleaning of various materials. For metal surface cleaning, gold plasma treatment is one of the common surface cleaning technique before device packaging. Not only gold but also various metal materials can be processed including aluminum, silver & titanium. We have a special process technique to reduce corrosion risk of metal surfaces caused by plasma cleaning process. Furthermore, multiple shelves inside process chamber enable batch processing of several samples in one time. For more spec details of the plasma cleaners, please visit the product page below.
Integrated solid-state nanopore platform for nanopore fabrication via dielectric breakdown, DNAspeed deceleration and noise reduction
Yusuke Goto, Itaru Yanagi, Kazuma Matsui, Takahide Yokoi & Ken-ichi Takeda
Center for Technology Innovation – Healthcare, Research & Development Group, Hitachi Ltd.,1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan.
Scientific Reports 6, Article number: 31324 (2016) doi:10.1038/srep31324
Samco plasma cleaner was used for surface cleaning and wettability modulation of substrates with Si3N4 membranes in sample preparation.
Surface fluorination of rutile-TiO2 thin films deposited by reactive sputtering for accelerating response of optically driven capillary effect
Taizo Kobayashi1, Hironobu Maeda2, and Satoshi Konishi3
1 Ritsumeikan-Global Innovation Research Organization, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
2 Graduate School of Science and Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
3 Department of Mechanical Engineering, Ritsumeikan University, Kusatsu, Shiga 525-8577, Japan
Japanese Journal of Applied Physics 55, 06GP03 (2016)
TiO2 thin films with the rutile phase were fluorinated using Samco RIE system to enhance the photoresponsivity.
Tsuyoshi MINAMI, Tsubasa SATO, Tsukuru MINAMIKI, and Shizuo TOKITO
Research Center for Organic Electronics (ROEL), Graduate School of Science and Engineering, Yamagata
University, 4-3-16 Jonan, Yonezawa, Yamagata 992–8510, Japan
Analytical Sciences (2015) 31
An organic field-effect transistor (OFET) was fabricated for detection of biogenic amines in an aqueous solution. In device fabrication, Samco Plasma Cleaner PC-300 was used for oxygen plasma treatment of metal electrodes for surface cleaning.
For more details of our plasma cleaners, please visit the product page below.
Controlled superficial assembly of DNA–amorphous calcium phosphate nanocomposite spheres for surface-mediated gene delivery
Ayako Oyaneaa, Hiroko Arakia, Maki Nakamuraa, Yoshiki Shimizua, Quazi T.H. Shubhraa, Atsuo Itob, Hideo Tsurushimaa, c
a Nanomaterials Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
b Health Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), Central 6, 1-1-1 Higashi, Tsukuba, Ibaraki 305-8566, Japan
c Department of Neurosurgery, Faculty of Medicine, University of Tsukuba, 1-1-1 Tennoudai, Tsukuba, Ibaraki 305-8575, Japan
SAMCO table-top RIE systsm was used for surface modification of polystyrene substrates in an oxygen plasma.