Category: UV-Ozone

21 Aug

Scientific paper on low-temperature annealing of InGaZnO transistors by Nara Institute of Science and Technology

Samco 2017 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Low temperature (150°C) wet oxygen annealing of amorphous InGaZnO thin-film transistors for flexible device applications

M. P. Jallorina, J. P. Bermundo, Y. Ishikawa and Y. Uraoka
Nara Institute of Science and Technology, Graduate School of Materials Science, 8916-5 Takayama, Ikoma, Nara 630-0192 Japan
2017 24th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), Kyoto, Japan, 2017, pp. 203-204.

Low-temperature processing is required in flexible polymer device fabrication because temperature setting is limited by native melting temperature of polymer materials. In this research, several methods of ultraviolet (UV), ozone (O3) and wet oxygen (Wet O2) were compared to investigate the effects on the device performance. Samco UV-ozone cleaner UV-1 was used for UV, ozone or UV-ozone processes. The results show that UV & O3 annealing at 150°C has higher mobility. Samco UV-ozone cleaners are equipped with stage heating (up to 300degC) and ex-situ ozone generator to promote generation of reactive atomic oxygen in thermal ozone dissociation. For more details of our UV-ozone technologies, please visit the product page.
Samco UV-Ozone Cleaner (Tabletop & Production Models)

Tabletop UV-Ozone Cleaner

20 Aug

Scientific paper on printable elastic conductors by the University of Tokyo

Samco 2017 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Printable elastic conductors by in situ formation of silver nanoparticles from silver flakes

Naoji Matsuhisa1, Daishi Inoue2, Peter Zalar1,3, Hanbit Jin1, Yorishige Matsuba1,3, Akira Itoh1,3, Tomoyuki Yokota1,3, Daisuke Hashizume2 and Takao Someya1,2,3,4
1Department of Electrical Engineering and Information Systems, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.
2Center for Emergent Matter Science (CEMS), RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
3Exploratory Research for Advanced Technology (ERATO), Japan Science and Technology Agency (JST), 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan.
4Thin-Film Device Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama 351-0198, Japan.
Nature Materials 16, 834–840 (2017)

Someya lab at the University of Tokyo is famous for printable and stretchable electronics for healthcare and wearable device applications. In this research, silver nanoparticles were used as conductive materials in flexible sensor and actuator networks, expecting large-area manufacturing using printing technologies. In the fabrication of stretchable pressure and temperature sensor, Samco UV-ozone cleaner UV-1 was used for UV curing of photoresist PSR-301A. Samco offers multiple systems of surface treatment (plasma cleaning and UV-ozone cleaning) for device fabrication and material research.

uv-1 uv-ozone cleaner

05 Jul

Scientific paper on surface wettability patterning by UT Dallas

Samco 2017 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Difference in growth and coalescing patterns of droplets on bi-philic surfaces with varying spatial distribution

Martand Mayukh Garimella, Sudheer Koppu, Shantanu Shrikant Kadlaskar, Venkata Pillutla, Abhijeet, Wonjae Choi
Department of Mechanical Engineering, University of Texas at Dallas, 800 W. Campbell Road, Richardson, TX 75080

Journal of Colloid and Interface Science (2017)

In this paper, surface wettability patterning was performed, and unique water droplet motion on the patterned regions was investigated. Samco UV-ozone cleaner, UV-1 at UT Dallas was used for complete native oxide removal after hydrofluoric acid treatment.

Surface wettability modulation (hydrophilic and hydrophobic) is fundamental for material research and device fabrication. Samco is developing surface treatment processes using UV-ozone technologies and plasma technologies. If you are interested in our latest material processing technologies and publication, please visit the page below.
Material Processing Data

Tabletop UV-Ozone Cleaner

16 Nov

Scientific Paper on β-Ga2O3 MOSFET Fabrication from U.S. Naval Research Laboratory

Samco 2016 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Communication—A (001) β-Ga2O3 MOSFET with +2.9 V Threshold Voltage and HfO2 Gate Dielectric

Marko J. Tadjerz, Nadeemullah A. Mahadik, Virginia D. Wheeler, Evan R. Glaser, Laura Ruppalt, Andrew D. Koehler, Karl D. Hobart, Charles R. Eddy Jr. and Fritz J. Kub
United States Naval Research Laboratory, Washington, DC 20375, USA
ECS J. Solid State Sci. Technol. 2016 volume 5, issue 9, P468-P470

Gallium Oxide (Ga2O3) is a wide bandgap material with high breakdown voltage, and it is a promising material for power device applications. Compared to other wide bandgap materials such as Silicon Carbide (SiC) and Gallium Nitride (GaN), the device research using this material is still primitive. However, β-Ga2O3 substrates are commercially available, and more and more researchers are getting interested in its unique material properties.

Here, β-Ga2O3 MOSFET was fabricated using commercially available β-Ga2O3 substrates. Samco UV-Ozone Cleaner at United States Naval Research Laboratory was used for surface cleaning of SiO2/Si substrate in sample preparation.

06 Sep

Scientific Paper on Wettability Control in Porous Media Using UV-Ozone Treatment by MIT

Samco 2016 Customer, Microfluidics, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Wettability control on multiphase flow in patterned microfluidics

Benzhong Zhaoa, Christopher W. MacMinnb, and Ruben Juanesa
a Department of Civil and Environmental Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139;
b Department of Engineering Science, University of Oxford, Oxford OX1 3PJ, United Kingdom
PNAS (2016) DOI10.1073/pnas.1603387113

Fluid–fluid displacement in porous media of microfluidic flow cell was studied for potential CO2 sequestration application to solve global warming caused by the greenhouse gas.
Samco tabletop UV-ozone cleaner at MIT was used for wettability improvement of photocurable polymer NOA81 to fabricate microfluidic flow cells.

This article was featured in MIT News.
View the news article.

15 May

Scientific Paper on ZnO UV-Ozone Treatment for ZnO-FET Fabrication from Chiba University

Samco 2016 Customer, OFET, SAMCO Customer Publication, Surface Treatment, UV-Ozone, ZnO

Physical Property Evaluation of ZnO Thin Film Fabricated by Low-Temperature Process for Flexible Transparent TFT

Khafe, Adie Bin Mohd1; Watanabe, Hiraku1; Yamauchi, Hiroshi1; Kuniyoshi, Shigekazu1; Iizuka, Masaaki2; Sakai, Masatoshi1; Kudo, Kazuhiro1
1 Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
2 Faculty of Education, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba, 263-8522, Japan
Journal of Nanoscience and Nanotechnology, Volume 16, Number 4, April 2016, pp. 3168-3175(8)

Samco UV-Ozone cleaner, UV-1 was used for ultraviolet/ozone (UV-O3) assisted thermal treatments on wet processed zinc oxide field effect transistor (ZnO-FET) to improve drain current and mobility of the ZnO-based device. They found that UV-Ozone treatment eliminated carbon impurities in ZnO thin film and improved the performance of ZnO-FET.

13 Apr

Scientific Paper on Tetracene Growth Process from Cornell University

Samco 2016 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Unexpected Effects of the Rate of Deposition on the Mode of Growth and Morphology of Thin Films of Tetracene Grown on SiO2

R. K. Nahm and J. R. Engstrom
School of Chemical and Biomolecular Engineering, Cornell University, Ithaca, New York 14853, United States
J. Phys. Chem. C, 2016, 120 (13), pp 7183–7191
DOI: 10.1021/acs.jpcc.6b00963

Samco UV-Ozone cleaner at Cornell University was used for sample preparation before tetracene growth.

07 Jan

Scientific Paper on Nanoparticle Fabrication Using SAMCO UV-Ozone System from The City College of New York

Samco 2016 Customer, ITO, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Electrostatically assisted fabrication of silver–dielectric core/shell nanoparticles thin film capacitor with uniform metal nanoparticle distribution and controlled spacing

Xue Lia, b, Olivia Niitsooa and Alexander Couzisa
a Department of Chemical Engineering, The City College of New York, NY 10031, United States
b Department of Chemical and Biomolecular Engineering, Lehigh University, Bethelehem, PA 18015, United States
Journal of Colloid and Interface Science (2016) 465, 333–341

Samco UV-Ozone cleaner at the City College of New York was used for UV-Ozone surface cleaning of ITO substrates before nanoparticle deposition.

11 Dec

Scientific Paper on Chemical Vapor Deposition Processing from Harvard University

Samco 2015 Customer, SAMCO Customer Publication, Surface Treatment, UV-Ozone

Direct-liquid-evaporation chemical vapor deposition of smooth, highly conformal cobalt and cobalt nitride thin films

Jing Yanga, Kecheng Lia, Jun Fengb and Roy G. Gordona,b
a School of Engineering, Applied Sciences, Harvard University, Cambridge, MA 02138, USA
b Department of Chemistry and Chemical Biology, Harvard University, Cambridge, MA 02138, USA

SAMCO UV-Ozone cleaner at Harvard University was used to remove organic contaminants from samples.

10 Sep

Scientific Paper on SU-8 Microlens Fabrication for LEDs from National Taiwan University

Samco 2015 Customer, LEDs, SAMCO Customer Publication, SU-8, Surface Treatment, UV-Ozone

Improved Light Uniformity From Light-Emitting Diodes by Heterogeneous Microlenses and 3-D Printed Mold

Cheng-Han Chiang and Guo-Dung John Su
Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan

SAMCO UV-Ozone cleaner was used for wettability modulation of SU-8 microlens.