Plasma cleaning systems are designed for the cleaning of plastic microelectronic packages and lead frames as well as LCD circuit boards and other products. Samco’s solutions include compact systems for R&D and pilot production, as well as large-chamber plasma cleaning systems.
(Direct Plasma Treatment)
Three Different Process Modes
(RIE, Plasma and Downstream Modes)
Fully Automated Processing
Easy Operation with Touch Panel
Samco UV-Ozone Cleaners utilize a combination of ultraviolet light, high concentration ozone and a heated stage
to provide a completely dry and damage free cleaning process for material research and device fabrication.
Complete Dry Process
In-situ Ozone Generator and Stage Heating Control for Enhancing Organic Residue Removal
No Plasma-induced Charging and Physical Damage to Circuits
Equipped with Ozone Decomposition Catalyst Unit
Multiple System Lineup for R&D and Production