Remote Plasma Cleaners (Downstream Plasma Cleaning)

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Remote Plasma Cleaners

Table-top Plasma Cleaners (Remote Plasma)

The Piccolo is a manual load system designed for surface cleaning of various types substrates, wafers or lead-frame packages. The system operates with a remote RF plasma source in the downstream process mode. The LFC150 is a manual load batch system designed for surface cleaning of various types of lead-frame packages typically housed in magazines. The system operates with a remote DC plasma source generated by a hot filament.

Typical applications include:

  • Surface activation and soft chemical removal of oxides or organic residues
  • Surface cleaning of lead-frames, plastic microelectronic packages, MEMS or micro-optic packages, hybrid or multi-chip modules
  • Surface treatment for improvement of gluing, bonding or encapsulation

High Volume Remote Plasma Cleaners

High-throughput Downstream Plasma Cleaners

As throughput needs increase both the RF and DC remote sources are offered in production based magazine equipment. The LFC063 can handle substrates up to 280 mm x 330 mm, and the Flexliner can handle substrates up to 330 mm x 330 mm. The systems include all the features of the base remote plasma systems, but add features such as sophisticated sensing for reliable high speed operation, and they are designed for minimal movement of substrates and magazines.

The systems are available in a number of configurations:

  • The substrates are moved from the input magazine into the process chamber and then into the output magazine.
  • The substrates are moved from the input magazine into the process chamber and then are returned to the same magazine.

Process Examples

Wettability Modulation

SAMCO plasma cleaners can process samples for surface modification.
Cyclic Olefin Copolymer (COC) coupons were processed using a plasma cleaner and characterized with water contact angle.
Depending on the process recipe, the samples showed hydrophobic or hydrophobic surfaces.

Initial (COC)

Initial COC
Contact Angle : 90.9°

Hydrophilic Treatment (COC)

COC after Hydrophilic Treatment
Contact Angle : 5.8°

Hydrophobic Treatment (COC)

COC after Hydrophobic Treatment
Contact Angle : 128.0°

Specification Chart

Remote Plasma Cleaners High Volume Remote Plasma Cleaners
Loading Manual Load Cassette Loading
Sample Size 330 mm x 330 mm
or
200 mm
280 mm x 330 mm
or
330 mm x 330 mm
Gases Up to 4 gas lines
Plasma Mode RF Remote Plasma Source

Hot Cathode or Hollow Cathode

RF Power 600/1000 W
System Control Easy-to-use Touch-panel GUI
System Features • Wafer or strip guide • Magazine for high throughput

• Gentile substrate handling with minimal movement

Applications

• Surface cleaning of metal leadframes and plastic microelectronic packages

• Surface treatment for improvement of gluing, bonding or encapsulation

• Mainly surface activation and removal of oxides or organic residues

• Optimum plasma processing for a variety of materials

System Features

 RF Downstream Plasma

RF Downstream Plasma

The RF powered hollow cathode remote plasma source uses a grid to separate the substrate to the plasma source. This ensures that sensitive substrates are effectively shielded from the primary RF plasma to reduce physical cleaning effects such as heating, Ion bombardment, and redeposition.

 DC Plasma with Hot Cathode

DC Plasma with Hot Cathode

The Hot Cathode Remote Plasma Source creates a DC plasma generated by a hot filament at low pressure. The patented plasma chemical cleaning process takes advantage of low-energy ions and radicals that react with surface contaminants to form volatile compounds.

 Magazine Processing

Magazine Loading

Magazine stacker enables the user to load 2 columns of magazines

  • Plasma Cleaners

Testimonial

 Samco plasma cleaners are used for device fabrication and material processing at nanofabrication facilities including

Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Contact us for more detail.
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