Process Solutions for HB LED Manufacturing

SAMCO Inc. > Markets > Process Solutions for HB LED Manufacturing

 1. PSS Fabrication by Sapphire Etching

PSS Fabrication on Sapphire Substrate
Patterned Sapphire Substrate (PSS) by plasma etching
Patterned Sapphire Substrate (PSS) by dry etching

SAMCO offers Patterned Sapphire Substrate (PSS) fabrication processes. The height and width of cone shape is adjustable with customers’ requests.

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2. p-GaN/Active/n-GaN Layer Deposition by MOCVD

p-GaN/Active/n-GaN Layer Deposition by MOCVD
MOCVD Systems
Wafers in MOCVD System Chamber

SAMCO MOCVD systems offer batch processing of small wafers.

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3. Expose n-GaN Layer by Dry Etching

Expose n-GaN Layer by Dry Etching
GaN Etch with Smooth Sidewalls

GaN etching with smooth sidewalls and bottom can be achieved by experienced process recipes.

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4. Electrode Formation

Electrode Formation
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5. Device Isolation by GaN Etching

Device Isolation by GaN Etching
GaN Tapered Etching
GaN-Anti-Mesa-Etching for GaN LED

Sidewall angle of GaN layer is highly controllable from positive to negative profile.

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6. Passivation Deposition by PECVD

Passivation Deposition by PECVD
SiO2 deposition uniformity

Batch processing of 6 x Ø4-inch wafers show high uniformity of SiO2 deposition.

Batch-to-batch Deposition Uniformity : ±0.2 %
Deposition Rate : 12.2 nm/min

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7. Contact Hole Formation

Contact Hole Formation by Dry Etching
Robot Arm Wafer Handling
SiO2 Etching for Contact Hole Formation

Double Cassettes and multi-joint robot wafer handling of SAMCO’s atmospheric cassette RIE systems improve throughput of SiO2 etching for contact hole formation.  The systems show stable SiO2 etch uniformity around ± 1.5% over 25 x ø4”wafers.

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8. Dicing and Wire Bonding

Cassette-to-Caesette DRIE System

SAMCO offers plasma scribing processes for compound semiconductor materials. Single wafer processing and batch processing of small wafers are available using state-of-the-art wafer handling methods.

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9. Dry Cleaning and Phosphor Coating before Packaging

HB LED
cassette loading uv ozone cleaner
Fully-automated cassette-to-cassette wafer loading

SAMCO’s atmospheric cassette UV-Ozone cleaners provide automated surface cleaning solutions before packaging.

Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Any questions? Contact us for more detail.
Contact SAMCO for more product information
Contact us for more detail.
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